Polycrystalline 3C-SiC was sequentially irradiated at 400 and 750˚C with 120 keV He 2+ and 4 MeV Kr 15+ ions to 10 17 and 410 16 cm-2 , respectively. The Kr 15+ ions penetrated the entire depth region of the He 2+ ion implantation. Three areas of He 2+ , Kr 15+ and He 2+ + Kr 15+ ion implanted SiC were created through masked overlapping irradiation. The sample was subsequently annealed at 1600˚C in vacuum and characterized using cross-sectional transmission electron microscopy and energy-dispersive x-ray spectroscopy. Compared to the He 2+ ion only implanted SiC, He cavities show a smaller size and higher density in the co-implanted SiC. At 25 dpa, presence of He in the co-implanted 3C-SiC significantly promotes cavity growth; much smaller voids are formed in the Kr 15+ ion only irradiated SiC at the same dose. In addition, local Kr migration and trapping at cavities occurs, but long-range Kr diffusion in SiC is not observed up to 1600˚C.