Finite element simulations of thin-film composite BAW resonators

Makkonen, T.; Holappa, A.; Ella, J.; Salomea, M.M.

doi:10.1109/58.949733

Cited by 125 publications

(71 citation statements)

References 50 publications

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“…The excitation of the plate by the PZT actuator patch is a typical case of linear steady state forced vibrations. Recent investigations by Makkonen et al [15] have shown that fairly accurate results can be obtained for such dynamic harmonic problems by FEM, even for frequencies of the order of GHz, provided there are 3-5 elements per half wavelength of the excited modes.…”

Section: Details Of Test Structurementioning

confidence: 98%

Wave propagation approach for NDE using surface bonded piezoceramics

Bhalla¹,

Soh²,

Liu³

2005

NDT & E International

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Section: Details Of Test Structurementioning

confidence: 98%

Wave propagation approach for NDE using surface bonded piezoceramics

Bhalla¹,

Soh²,

Liu³

2005

NDT & E International

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“…Ceramic plates with in-plane poling can also be driven into thickness-twist vibrations by a thickness-electric field. Piezoelectric devices are also often multilayered [11][12][13] , which causes considerable complications in modeling. Known exact theoretical results concerning thicknesstwist waves are mostly for infinite plates [5] or semi-infinite wedges [6] .…”

Section: Introductionmentioning

confidence: 99%

An exact analysis of forced thickness-twist vibrations of multi-layered piezoelectric plates

Ziguang

Yang

et al. 2007

Acta Mech. Solida Sin.

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This paper deals with the thickness-twist vibration of a multi-layered rectangular piezoelectric plate of crystals of 6 mm symmetry or polarized ceramics. An exact solution is obtained from the three-dimensional equations of linear piezoelectricity. The solution is useful to the understanding and design of composite piezoelectric devices. A piezoelectric resonator, a piezoelectric transformer, and a piezoelectric generator are analyzed as examples.

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“…In this section we give a brief discussion of the generalization of the FEM method [7] to three-dimensional (3D) two-layer sandwich structure. Consider the electro-elastic vibrations of the structure, including the LiNbO 3 (1) and GaAs (2) parallelepiped-shaped layers shown in Fig.…”

Section: Problem Formulationmentioning

confidence: 99%

Acoustically driven charge separation in semiconductor heterostructures sensed by optical spectroscopy techniques

2009

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Abstract:We demonstrate a method of using a two-layer sandwich structure, which includes a LiNbO 3 plate and a semiconductor heterostructure to create an inhomogeneous stress and piezoelectric harmonic potential in the semiconductor. Both the GaAs/AlGaAs quantum well (QW) structures and SiGe/Si heterostructures are attempted, working with and without using a piezoelectric field in the semiconductor layer. The standing-wave fields generated in the semiconductor and the electron and hole distributions driven by the piezoelectric field are computed by finite element method (FEM) techniques. It is experimentally shown that, in a GaAs/Al Ga 1− As asymmetric double quantum well structure, the resonance enhancement of the narrower QW photoluminescence band is observed, which may be explained by the resonant charge transfer between the wider and narrower QWs. It is also shown that the piezoelectric fields quench the pure LO-phonon lines in the Raman spectra, whereas the coupled LO-phonon-plasmon mode strengthens. Experimental results indicate that the charge separation occurs in the plane of the QWs due to the piezoelectric fields. The recombination of carriers in the SiGe/Si heterostructures can be effectively enhanced by the presence of ultrasonic stress, displaying features consistent with varying electrical activity at dislocations. 78.67.De, 78.20.Hp, 62.65.+k PACS (2008):

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Finite element simulations of thin-film composite BAW resonators

Cited by 125 publications

References 50 publications

Wave propagation approach for NDE using surface bonded piezoceramics

Wave propagation approach for NDE using surface bonded piezoceramics

An exact analysis of forced thickness-twist vibrations of multi-layered piezoelectric plates

Acoustically driven charge separation in semiconductor heterostructures sensed by optical spectroscopy techniques

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