Field Emission Ion Source Using a Carbon Nanotube Array for Micro Time-of-Flight Mass Spectrometer

Han, Kyusung; Lee, Yuri; Jun, Dohan; Lee, Soonil; Jung, Kwang‐Woo; Yang, Sang Sik

doi:10.7567/jjap.50.06gm04

Cited by 11 publications

(7 citation statements)

References 16 publications

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“…Several small mass spectrometers with field emission sources have been constructed [71,72], including the miniature ion trap for the European Space Agency's Rosetta Comet Rendezvous Mission [73]. More recent devices have used carbon nanoparticles [74] and nanotubes [75,76] as sharp emitting tips, with advanced devices being fabricated in arrays with double gates [77].…”

Section: Mems Ion Sourcesmentioning

confidence: 99%

MEMS mass spectrometers: the next wave of miniaturization

Syms

Wright²

2016

J. Micromech. Microeng.

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This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. Mass spectrometer systems containing MEMS sub-components are then described, applications for miniaturized and portable systems are discussed, and challenges and opportunities are presented.

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Section: Mems Ion Sourcesmentioning

confidence: 99%

MEMS mass spectrometers: the next wave of miniaturization

Syms

Wright²

2016

J. Micromech. Microeng.

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“…13,14 Carbon nanotubes (CNTs) were widely used as a candidate for electron field emitters, in various applications. 9,15–18 Bo et al 19 demonstrated that a carbon nanotube-based electrode in corona discharge precipitators reduces the production of ozone, which is a positive environmental effect, but this is also beneficial from the point of view of ion generation in the ionisation source, as ozone is one of the reactive species, responsible for the formation of NO 2 . Borisenko et al 20 developed a field ionisation source based on nanotubes.…”

Section: Introductionmentioning

confidence: 99%

An atmospheric pressure field effect ionisation source for ion mobility spectrometry

2022

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“…[17][18][19][20] For these reasons, CNT field electron emitters have been widely studied in many applications such as flat-panel displays, microwave power amplifier tubes, nanoscale field-effect transistors (nano-FETs), and mechanical structures requiring low weight and high strength. [21][22][23][24][25][26][27][28][29] Diode-type CNT field emitters have been studied for their high emission current. [27][28][29] Han et al have applied a diode-type CNT field emitter to EI for a TOFMS.…”

Section: Introductionmentioning

confidence: 99%

“…[21][22][23][24][25][26][27][28][29] Diode-type CNT field emitters have been studied for their high emission current. [27][28][29] Han et al have applied a diode-type CNT field emitter to EI for a TOFMS. 29) However, the diode-type CNT field emitter is not suitable as an ionizer because of the low ionization efficiency.…”

Section: Introductionmentioning

confidence: 99%

“…[27][28][29] Han et al have applied a diode-type CNT field emitter to EI for a TOFMS. 29) However, the diode-type CNT field emitter is not suitable as an ionizer because of the low ionization efficiency. In the diode-type emitter, the ions are more attracted to the CNT cathode than to the ion collector because the ionization gap between the anode and the cathode is very small compared with the distance from the ionization region to the ion collector.…”

Section: Introductionmentioning

confidence: 99%

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A triode-type carbon nanotube ionizer for micro mass spectrometer

Lee

Hong

et al. 2014

Jpn. J. Appl. Phys.

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This article presents an ionizer based on a triode structure for a micromachined time-of-flight mass spectrometer (TOFMS). The fabricated device has two components in one chip: a triode-type field emitter for ionization and an ion separator with acceleration electrodes. The electron emitter is an array of carbon-nanotube (CNT) pillars grown by hot-filament chemical vapor deposition (HFCVD). The anode current measured in the field-emission characteristic test of the fabricated device is high, up to 72.1 µA. The gate current is about 5% of the anode current, which implies low electron interception. We confirmed the ionization by electron impact and obtained the mass spectrum of the air from the fabricated device using a microchannel plate (MCP). The results show that the fabricated TOFMS is feasible for cheap miniature mass spectral analyzers.

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Field Emission Ion Source Using a Carbon Nanotube Array for Micro Time-of-Flight Mass Spectrometer

Cited by 11 publications

References 16 publications

MEMS mass spectrometers: the next wave of miniaturization

MEMS mass spectrometers: the next wave of miniaturization

An atmospheric pressure field effect ionisation source for ion mobility spectrometry

A triode-type carbon nanotube ionizer for micro mass spectrometer

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