Fiber-optic Fabry–Perot pressure sensor based on low-temperature co-fired ceramic technology for high-temperature applications

Abstract

In this study, a novel batch-producible fiber-optic Fabry-Perot (FP) pressure sensor based on a low-temperature co-fired ceramic technology is proposed and experimentally demonstrated for high-temperature applications. The sensor is fabricated by inserting a well-cut single-mode fiber (SMF) into a zirconia fiber ferrule, followed by insertion of the overall structure into an alumina sensor head. The FP cavity in the sensor is formed by placing the end face of the SMF in parallel to the diaphragm. The external pressure can be detected by demodulating the FP cavity length of the sensor. A theoretical analysis indicates that the pressure sensitivity can be designed flexibly by adjusting the parameters of the ceramic diaphragm, radius, and thickness. Experimental results demonstrate that the pressure sensor exhibits a high linear sensitivity of approximately 0.1 μm/kPa at room temperature in the pressure range up to 160 kPa. The repeatability error and nonlinear error of three repeatable experiments are approximately 2.60% and smaller than 0.101%, respectively. The temperature coefficient and coefficient of the pressure-sensitivity changes with temperature are 0.023 μm/°C and 0.205 nm/(kPa°C) in the temperature range of 20°C-300°C.

A Sensing Peak Identification Method for Fiber Extrinsic Fabry–Perot Interferometric Refractive Index Sensing

“…With excellent performance in measurement accuracy, resolution, and stability, the Fabry–Perot fiber interferometer (FPI) has attracted tremendous interest for use in temperature [1,2], pressure [3,4], strain [5,6] sensing, biosensing [7,8], and dispersion measuring [9] applications. The FPI can be classified as intrinsic Fabry–Perot interferometer (IFPI) or extrinsic Fabry–Perot interferometer (EFPI) according to their construction.…”

Ultrahigh Sensitivity of a Plasmonic Pressure Sensor with a Compact Size

“…Plasmonic optical pressure sensors with the immune of EM wave disturbance have received considerable attention ever since numerous applications in the engineering field of biomedicines, mechanics, and electric optics [39]. Most reported optical pressure sensors are based on the Fabry-Perot interferometer [40,41], SiO 2 diaphragm [42], monolithic capacitive pressure sensor [43], Mach-Zehnder interferometer [44], optical fibers [45,46], etc. They show a larger size and have a drawback of less compatibility to IOCs.…”

A Large-Area and Nanoscale Graphene Oxide Diaphragm-Based Extrinsic Fiber-Optic Fabry–Perot Acoustic Sensor Applied for Partial Discharge Detection in Air

“…Currently, fiber-optic Fabry-Perot (F-P) sensors based on the optical interference sensing principle are very popular sensors used in the detection of some key parameters in the field of power engineering [8][9][10]. In fact, fiber-optic F-P sensors can be divided into intrinsic and extrinsic sensors [11][12][13][14], and at present, the latter can be considered as the most extensive and popular fiber-optic F-P sensors owing to their simple structure, easy design and manufacturing process, and so on [15][16][17][18]. Additionally, extrinsic sensors have been mainly used in any research field needing acoustic sensing technology [19][20][21][22][23].…”