2021
DOI: 10.3390/nano11113147
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Ultrahigh Sensitivity of a Plasmonic Pressure Sensor with a Compact Size

Abstract: This study proposes a compact plasmonic metal-insulator-metal pressure sensor comprising a bus waveguide and a resonator, including one horizontal slot and several stubs. We calculate the transmittance spectrum and the electromagnetic field distribution using the finite element method. When the resonator’s top layer undergoes pressure, the resonance wavelength redshifts with increasing deformation, and their relation is nearly linear. The designed pressure sensor possesses the merits of ultrahigh sensitivity, … Show more

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Cited by 24 publications
(7 citation statements)
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“…During the process, electron beam vaporizes and coats the carrier with the silver layer before removing the resin marks. Finally, the cavity is formed during the lifting process [59][60][61].…”
Section: Resultsmentioning
confidence: 99%
“…During the process, electron beam vaporizes and coats the carrier with the silver layer before removing the resin marks. Finally, the cavity is formed during the lifting process [59][60][61].…”
Section: Resultsmentioning
confidence: 99%
“…In this section, we discuss the application of the proposed elliptical waveguide in the paper as a pressure sensor. The optical pressure sensors based on SPP have myriad considerations due to their nano scale size, 29 31 which offers potential applications in biological and biomedical engineering. When a waveguide is deformed due to external pressure, the effective refractive index changes 32 , 33 .…”
Section: Applicationmentioning
confidence: 99%
“…The dielectric in the rectangular ring resonator and waveguides is air, and the metal material is silver. The fabrication of MIM waveguides and resonator is achievable with current technologies [48,49]. For example, MIM waveguides can be realized with the following steps: metal layer deposition, spin coating, E-beam writing, developing, chemical etching, and resist removal.…”
Section: Model and Analysis Of Structurementioning
confidence: 99%