Fiber chirped pulse amplification system for micromachining

Arai, Alan; Bovatsek, Jim; Yoshino, Fumiyo; Liu, Z.; Cho, G. C.; Shah, Lawrence; Fermann, M. E.; Uehara, Yuzuru

doi:10.1117/12.707699

Cited by 10 publications

(3 citation statements)

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“…A robust, stable and very compact fiber chirped pulse amplifier was also developed in the 2000s, 28 which facilitated the application of this research. More recently, a rare earth-doped laser medium was adopted to realize a compact and high-power ultrafast laser system by diode pumping, although the pulses were much broader than pulses generated by Ti:sapphire systems.…”

Section: Introductionmentioning

confidence: 99%

Ultrafast lasers—reliable tools for advanced materials processing

2014

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The unique characteristics of ultrafast lasers, such as picosecond and femtosecond lasers, have opened up new avenues in materials processing that employ ultrashort pulse widths and extremely high peak intensities. Thus, ultrafast lasers are currently used widely for both fundamental research and practical applications. This review describes the characteristics of ultrafast laser processing and the recent advancements and applications of both surface and volume processing. Surface processing includes micromachining, microand nanostructuring, and nanoablation, while volume processing includes two-photon polymerization and three-dimensional (3D) processing within transparent materials. Commercial and industrial applications of ultrafast laser processing are also introduced, and a summary of the technology with future outlooks are also given.

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Section: Introductionmentioning

confidence: 99%

Ultrafast lasers—reliable tools for advanced materials processing

2014

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“…Regular arrays of conical microstructures were also produced on Si by irradiation with an ultrafast laser beam in a halogen atmosphere (e.g., SF6 or Cl2) [10]. A robust, stable, and very compact fiber chirped pulse amplifier was also developed in the 2000s [11], which facilitated the application of this research. More recently, a rare-earth-doped laser medium was adopted to realize a compact and high-power ultrafast laser system by diode pumping, although the pulses were much broader than pulses generated by Ti:sapphire systems [12,13].…”

Section: Spie Fellow Canada Research Chair In Quantum Semiconductorsmentioning

confidence: 99%

Front Matter: Volume 9350

2015

SPIE Proceedings

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“…In addition, the improvement in the performance of ultrafast laser systems in the 2000s has been a significant contribution to realizing more reliable ultrafast laser processing for practical use. A robust, stable, and very compact fiber chirped pulse amplifier (FCPA) was developed in 2006 [20] and has expanded the range of applications. Furthermore, a compact and high-power ultrafast laser system based on a rare-earthdoped laser medium by diode pumping was developed in 2008 and is applicable to industrial applications, although the typical pulse width was in the order of picoseconds [21,22].…”

Section: Introduction and Historymentioning

confidence: 99%

Progress in ultrafast laser processing and future prospects

Sugioka

2017

Nanophotonics

169

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Abstract:The unique characteristics of ultrafast lasers have rapidly revolutionized materials processing after their first demonstration in 1987. The ultrashort pulse width of the laser suppresses heat diffusion to the surroundings of the processed region, which minimizes the formation of a heat-affected zone and thereby enables ultrahigh precision micro-and nanofabrication of various materials. In addition, the extremely high peak intensity can induce nonlinear multiphoton absorption, which extends the diversity of materials that can be processed to transparent materials such as glass. Nonlinear multiphoton absorption enables three-dimensional (3D) micro-and nanofabrication by irradiation with tightly focused femtosecond laser pulses inside transparent materials. Thus, ultrafast lasers are currently widely used for both fundamental research and practical applications. This review presents progress in ultrafast laser processing, including micromachining, surface micro-and nanostructuring, nanoablation, and 3D and volume processing. Advanced technologies that promise to enhance the performance of ultrafast laser processing, such as hybrid additive and subtractive processing, and shaped beam processing are discussed. Commercial and industrial applications of ultrafast laser processing are also introduced. Finally, future prospects of the technology are given with a summary.

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Fiber chirped pulse amplification system for micromachining

Cited by 10 publications

References 0 publications

Ultrafast lasers—reliable tools for advanced materials processing

Ultrafast lasers—reliable tools for advanced materials processing

Front Matter: Volume 9350

Progress in ultrafast laser processing and future prospects

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