2014
DOI: 10.1038/lsa.2014.30
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Ultrafast lasers—reliable tools for advanced materials processing

Abstract: The unique characteristics of ultrafast lasers, such as picosecond and femtosecond lasers, have opened up new avenues in materials processing that employ ultrashort pulse widths and extremely high peak intensities. Thus, ultrafast lasers are currently used widely for both fundamental research and practical applications. This review describes the characteristics of ultrafast laser processing and the recent advancements and applications of both surface and volume processing. Surface processing includes micromach… Show more

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Cited by 1,152 publications
(644 citation statements)
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References 139 publications
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“…Here, ωo is the actual beam diameter of the focused Gaussian laser beam [1,2,45]. A two-dimensional (2D) array of nanoholes with diameters smaller than 200 nm was formed on a GaN surface by femtosecond laser ablation at a wavelength of 387 nm based on two-photon absorption using an objective lens with a numerical aperture (NA) of 0.9 [46,47].…”
Section: Nanoablationmentioning
confidence: 99%
See 1 more Smart Citation
“…Here, ωo is the actual beam diameter of the focused Gaussian laser beam [1,2,45]. A two-dimensional (2D) array of nanoholes with diameters smaller than 200 nm was formed on a GaN surface by femtosecond laser ablation at a wavelength of 387 nm based on two-photon absorption using an objective lens with a numerical aperture (NA) of 0.9 [46,47].…”
Section: Nanoablationmentioning
confidence: 99%
“…Ultrafast lasers, which is a generic term for picosecond and femtosecond lasers, have created a new path to laser processing of materials in terms of the capabilities in ultrahigh precision micro-and nanofabrication of not only opaque but also transparent materials and threedimensional (3D) and volume processing [1,2]. The pulse *Corresponding Author: Koji Sugioka: RIKEN Center for Advanced Photonics, Wako, Saitama 351-0198, Japan, E-mail: ksugioka@riken.jp width of ultrafast lasers is defined as several tens of femtoseconds to tens of picoseconds, where a pulse width shorter than picoseconds is typically used for fundamental research, while longer pulses are used for commercial and industrial applications because of the high output power and high reliability.…”
Section: Introduction and Historymentioning
confidence: 99%
“…Generation of complex structures with high resolution and without the necessity of photomasks are the major advantages of direct laser writing techniques compared to traditional lithography methods. Higher resolutions can be obtained by using two-photon absorption (TPA) where excitation wavelengths in the near-infrared (NIR) were used in combination with femtosecond pulsed lasers [18][19][20]. Recent works also reported possible TPA in visible light [21] or with picosecond pulses [22].…”
Section: Introductionmentioning
confidence: 99%
“…It is well known that defects engineering is a general approach to adjust material physical properties of magnetic 9,10 and optical [11][12][13] characteristic. For instance, Xing et al 9 carried out a comprehensive study of the connection between defects and magnetic and optical properties.…”
Section: Introductionmentioning
confidence: 99%