Femtosecond laser processing of ceria-based micro actuators

Mishuk, Eran; Shklovsky, Jenny; Berg, Yuval; Vengerovsky, Niv; Paul, Thierry; Kotler, Zvi; Tsur, Yoed; Shacham‐Diamand, Yosi; Krylov, Slava; Lubomirsky, Igor

doi:10.1016/j.mee.2019.111126

Cited by 4 publications

(2 citation statements)

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“…The FLICE method for preparing three-dimensional (3D) structures comprises two steps: first, photomodification of the transparent material by irradiating a train of pulses with a focused femtosecond laser beam; second, immersion of the irradiated material in etching solutions for a specified duration. For example, the fabrication of 3D microchannels with the FLICE method has been realized for silica 17 – 19 , sapphire 20 , and borosilicate glasses 21 . In addition, laser-induced chemical etching has been applied for quartz crystal surface structuring 22 or in-quartz microchannel fabrication 21 .…”

Section: Introductionmentioning

confidence: 99%

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

Linden

Melech

Sakaev³

et al. 2023

Microsyst Nanoeng

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A novel technology for the precise fabrication of quartz resonators for MEMS applications is introduced. This approach is based on the laser-induced chemical etching of quartz. The main processing steps include femtosecond UV laser treatment of a Cr-Au-coated Z-cut alpha quartz wafer, followed by wet etching. The laser-patterned Cr-Au coating serves as an etch mask and is used to form electrodes for piezoelectric actuation. This fabrication approach does not alter the quartz’s crystalline structure or its piezo-electric properties. The formation of defects, which is common in laser micromachined quartz, is prevented by optimized process parameters and by controlling the temporal behavior of the laser-matter interactions. The process does not involve any lithography and allows for high geometric design flexibility. Several configurations of piezoelectrically actuated beam-type resonators were fabricated using relatively mild wet etching conditions, and their functionality was experimentally demonstrated. The devices are distinguished from prior efforts by the reduced surface roughness and improved wall profiles of the fabricated quartz structures.

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Section: Introductionmentioning

confidence: 99%

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

Linden

Melech

Sakaev³

et al. 2023

Microsyst Nanoeng

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“…Considering the increasing importance of the GDC based actuators a series of studies has been initiated using x-ray diffraction, electron microscopy, atomic force microscopy, electrochemical impedance spectroscopy and data analysis using these techniques. Recently, it has been shown that GDC based thin films (thickness ∼1-2 µm) are mechanically reliable for actuators and microelectromechanical systems (MEMS) [12,13]. The lowest total resistance is obtained in a device with Ti contacts, that shows very complex electromechanical response [12].…”

Section: Introductionmentioning

confidence: 99%

Modeling of the impedance data of gadolinia doped ceria based actuators: a distribution function of relaxation times and machine learning approach

Paul

2020

J. Phys. D: Appl. Phys.

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Gadolinia-doped ceria is one of the most extensively examined oxide ion conductors to exhibit large nonclassical electrostriction. The electromechanical response depends on the grain and grain boundaries which can be probed using electrochemical impedance spectroscopy. In this study, we have modeled the impedance spectra from buckled and free standing gadolinia doped ceria (Gd0.2Ce0.8O1.9) membrane in Al/Ti/Gd0.2Ce0.8O1.9/Ti/Al electromechanical device, at different AC excitation voltages (2, 4, 6, 8 and 10 V), and starting from room temperature to 100 °C. The analysis of impedance spectrum is commonly done by equivalent circuit modeling to obtain the resistors ( R ) and capacitors ( C ). However, to overcome the inherent problems like non-uniqueness, over fitting, presently different approaches have been chosen such as impedance spectroscopy genetic programming (ISGP) and artificial neural networks (ANNs). ISGP finds an analytic form of the distribution function of relaxation times (DFRTs) using impedance spectra. The DFRT analysis reveals that the grain boundary capacitance for the membrane ∼10−8–10−9 F decreases with increasing temperature and excitation voltages. Besides, neural networks, which are optimized by Bayesian regularization, simulate both the real and imaginary parts of impedance following the pattern of experimental data up to several Hz. The DFRT analysis on this simulated impedance data shows an effect of grain boundaries. Indeed, ANNs as optimized by Levenberg-Marquardt method, can estimate the R and C ’s for present system with maximum relative errors of 24% and 22%, respectively.

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