2010
DOI: 10.1016/j.cirpj.2010.02.003
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Fabrication techniques and material properties of dielectric MgO thin films—A status review

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Cited by 57 publications
(25 citation statements)
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“…Using these values, the effective resistancearea product is RA(0) ≈ 0.14 Ω · µm 2 and the magnitude of the ac resistance is ∆R ≈ 21.7 kΩ. Finally, ε = 9.8 is a reasonable estimate for the relative permittivity of the MgO barrier 30 .…”
Section: B Electrical Parameters Of the Atjmentioning
confidence: 95%
See 1 more Smart Citation
“…Using these values, the effective resistancearea product is RA(0) ≈ 0.14 Ω · µm 2 and the magnitude of the ac resistance is ∆R ≈ 21.7 kΩ. Finally, ε = 9.8 is a reasonable estimate for the relative permittivity of the MgO barrier 30 .…”
Section: B Electrical Parameters Of the Atjmentioning
confidence: 95%
“…The TAMR ratio η can be calculated for given ∆R as η = 2∆R/(R 0 − ∆R). The capacitance of an ATJ can be estimatd as the capacitance of a square parallel-plate capacitor with a plate size a = √ S and the distance d between the plates: C = εε 0 S/d (ε is the MgO relative permittivity 30 , and ε 0 is the vacuum permittivity). The inductance of an ATJ can be evaluated as L = µ 0 d, where µ 0 is the vacuum permeability.…”
Section: B Electrical Parameters Of the Atjmentioning
confidence: 99%
“…Many researchers have used metal-organic chemical vapor deposition (MOCVD), (Fujita et al, 1999;Zeng et al, 1996;Sung et al, 2000) laser ablation , and electron beam evaporation (P. O'Connor Casey et al, 2009) to synthesize epitaxial MgO films. In addition, MgO films showing various orientations and morphologies have been deposited using various techniques (Raj et al, 2010).…”
Section: Introductionmentioning
confidence: 99%
“…Both single and multilayer MgO can be deposited using several methods such as pulsed laser deposition, electron beam evaporation, chemical vapor deposition and sol-gel spin coating technique [6], [11]. Compared to others, sol-gel offers several advantages, such as good film homogeneity, easy stoichiometry control, purity, ease of processing and controlling the composition, and the ability to coat at large and complex area substrates [12], [13].…”
Section: Introductionmentioning
confidence: 99%