Fabrication of Photonic Ring Resonator Device in Silicon Waveguide Technology Using Soft UV-Nanoimprint Lithography

Plachetka, Ulrich; Koo, Namil; Wahlbrink, T.; Bolten, Jens; Waldow, Michael; Plötzing, Tobias; Först, Michael; Kurz, H.

doi:10.1109/lpt.2008.918386

Cited by 15 publications

(3 citation statements)

References 11 publications

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“…It has the advantage of having fast turnaround time and requiring no special setups. Although electron beam lithography (EBL) is used here, it can be replaced by more cost-effective lithography methods such as deep-UV stepper [17,18] or nanoimprint lithography [19] (under the thermal budget) in order to achieve low-cost fabrication. Various silicon photonic devices such as microring resonators and grating couplers are fabricated and optically characterized.…”

Section: Introductionmentioning

confidence: 99%

Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing

Fan¹,

Varghese²,

Xuan³

et al. 2012

Opt. Express

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We demonstrate a process to fabricate silicon photonic devices directly on a plastic film which is both flexible and transparent. This process allows the integration of complex structures on plastic films without the need of transferring from another substrate. Waveguides, grating couplers, and microring resonators are fabricated and optically characterized. An optical strain sensor is shown as an application using 5 µm-radius microring resonators on the flexible substrate. When strain is applied, resonance wavelength shifts of the microring resonators are observed. Contributions of different effects are analyzed and evaluated. Finally, we measure the influence of residual strain and confirm the material undergoes elastic deformation within the applied strain range.

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Section: Introductionmentioning

confidence: 99%

Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing

Fan¹,

Varghese²,

Xuan³

et al. 2012

Opt. Express

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“…The UV-curable resist with very low viscosity is able to spread out on the substrate and fill the space with the capillary effect during imprinting. If a flexible stamp is used, the NIL is called soft thermal-NIL or soft UV-NIL [28,29]. Deformation of the soft stamp leads to distortion of the imprinted structure and limits the resolution of soft UV-NIL.…”

Section: Nilmentioning

confidence: 99%

A review of thin-film transistors/circuits fabrication with 3D self-aligned imprint lithography

Chu

2017

Flex. Print. Electron.

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Nanoimprint lithography (NIL) is a promising method for the fabrication of micro/nanostructures through a simple, low-cost, and high throughput process. Imprinted 2D structure with high resolution has been demonstrated successfully for certain applications including magnetic hard disks and optical gratings. Manufacturing low-cost electronic devices that require patterned multi-layers with NIL is very challenging, particularly for those requiring different patterns. In recent years, considerable effort has been made using the self-aligned imprinting technique, opening an alternative way to develop and fabricate complementary flexible electronics. In this paper we review thin film transistor (TFT) fabrication with 3D self-aligned imprint lithography (SAIL), which enables the patterning and alignment of submicron features on meter-scale flexible substrates in the roll-to-roll configuration. The 3D SAIL solves the problem of precision interlayer registry of devices on a moving web by encoding all geometric information required for all device patterning steps into a monolithic imprinted 3D structure.

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“…Nanophotonic circuit components are among the most promising application of the nanoimprint. Several authors reported the use of thermal or UV nanoimprint for the fabrication of optical integrated resonators on polymer [1] or SOI [2] respectively. The current paper aims at demonstrating the potential and benefits of using thermal nanoimprint lithography fabrication for high quality factor (Q) silicon micro-disk resonators.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of High Q Microdisk Resonators using Thermal Nanoimprint Lithography

Schiavone

Chaix

et al. 2010

Conference on Lasers and Electro-Optics 2010

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Fabrication of Photonic Ring Resonator Device in Silicon Waveguide Technology Using Soft UV-Nanoimprint Lithography

Cited by 15 publications

References 11 publications

Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing

Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing

A review of thin-film transistors/circuits fabrication with 3D self-aligned imprint lithography

Fabrication of High Q Microdisk Resonators using Thermal Nanoimprint Lithography

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