Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing

Fan, Li; Varghese, Leo T.; Xuan, Yi; Wang, Jian; Niu, Ben; Qi, Minghao

doi:10.1364/oe.20.020564

Cited by 60 publications

(40 citation statements)

References 33 publications

(39 reference statements)

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“…The flexible resonators exhibited an average intrinsic Q value of 110,000. The number is slightly lower compared to devices printed on Si substrates but is 50 times higher than previous reports of monolithically integrated optical resonator structures on flexible substrates [56]. The lower Q is likely due to the inferior surface quality of the flexible substrate.…”

Section: Direct Monolithic Imprint Fabrication On Nonplanar Substratesmentioning

confidence: 60%

Demonstration of high-performance, sub-micron chalcogenide glass photonic devices by thermal nanoimprint

Zou

Moreel

Zhou

et al. 2014

Integrated Optics: Devices, Materials, and Technologies XVIII

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High-index-contrast optical devices form the backbone of densely integrated photonic circuits. While these devices are traditionally fabricated using lithography and etching, their performance is often limited by defects and sidewall roughness arising from fabrication imperfections. This paper reports a versatile, roll-to-roll and backend compatible technique for the fabrication of high-performance, high-index-contrast photonic structures in composition-engineered chalcogenide glass (ChG) thin films. Thin film ChG have emerged as important materials for photonic applications due to their high refractive index, excellent transparency in the infrared and large Kerr non-linearity. Both thermally evaporated and solution processed As-Se thin films are successfully employed to imprint waveguides and micro-ring resonators with high replicability and low surface roughness (0.9 nm). The micro-ring resonators exhibit an ultra-high quality-factor of 4 × 10 5 near 1550 nm wavelength, which represents the highest value reported in ChG micro-ring resonators. Furthermore, sub-micron nanoimprint of ChG films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.

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Section: Direct Monolithic Imprint Fabrication On Nonplanar Substratesmentioning

confidence: 60%

Demonstration of high-performance, sub-micron chalcogenide glass photonic devices by thermal nanoimprint

Zou

Moreel

Zhou

et al. 2014

Integrated Optics: Devices, Materials, and Technologies XVIII

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show abstract

“…Another attempt to demonstrate flexible photonic device was to fabricate photonic device directly on amorphous silicon which is directly deposited onto flexible substrates. [5] The drawback of this method is that the optical characteristic of amorphous silicon is not as good as single crystal silicon. Besides, patterning photonic devices on soft material is not a reliable procedure especially when the feature size is small.…”

Section: Introductionmentioning

confidence: 99%

High-performance conformal sensors employing single-crystal silicon nanomembranes

Subbaraman

Chakravarty

et al. 2014

Silicon Photonics IX

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We demonstrate light-weight, conformal, and high-performance flexible sensors fabricated on a large area (>2 cm x 2 cm) silicon nanomembrane transferred onto a flexible substrate. Linear L13 photonic crystal microcavities are designed to provide high quality factors on the flexible platform. Subwavelength grating (SWG) couplers are employed in order to enable efficient light coupling to the device using a single mode fiber. Photonic crystal tapers are implemented at the strip-photonic crystal waveguide interfaces to minimize loss. Preliminary chemical sensing data suggests a sensitivity of 75nm/RIU. Bending tests are further performed in order to demonstrate sensitivityindependent operation.

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“…3 However, a-Si:H offers a more flexible fabrication process since it can be deposited at relatively low temperatures (≤300°C) and therefore allows using glass or plastic materials as substrates. 4,5 This facilitates a low-cost fabrication and offers more processing options, e.g., for the combination with microfluidic channels using split-and-recombine micromixers or for the arrangement of the sensing resonators that can be principally fabricated in a vertically stacked configuration.…”

Section: Introductionmentioning

confidence: 99%

Label-free photonic biosensors fabricated with low-loss hydrogenated amorphous silicon resonators

Lipka

2013

J. Nanophoton

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Abstract. The precise detection of chemicals and biomolecules is of great interest in the areas of biotechnology and medical diagnostics. Thus, there is a need for highly sensitive, small area, and low-cost sensors. We fabricated and optically characterized hydrogenated amorphous silicon photonic resonators for label-free lab-on-chip biosensors. The sensing was performed with small-footprint microdisk and microring resonators that detect a refractive-index change via the evanescent electric field. Homogeneous sensing with NaCl and surface-sensing experiments with immobilized bovine serum albumin (BSA) were carried out. A sensitivity as high as 460 nm∕RIU was measured for NaCl dissolved in deionized water for the disk, whereas about 50 nm∕RIU was determined for the ring resonator. The intrinsic limits of detection were calculated to be 3.3 × 10 −4 and 3.2 × 10 −3 at 1550-nm wavelength. We measured the binding of BSA to functionalized ring resonators and found that molecular masses can be detected down to the clinically relevant femtogram regime. The detection and quantification of related analytes with hydrogenated amorphous silicon photonic sensors can be used in medical healthcare diagnostics like point-of-care-testing and biotechnological screening. © The Authors.Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing

Cited by 60 publications

References 33 publications

Demonstration of high-performance, sub-micron chalcogenide glass photonic devices by thermal nanoimprint

Demonstration of high-performance, sub-micron chalcogenide glass photonic devices by thermal nanoimprint

High-performance conformal sensors employing single-crystal silicon nanomembranes

Label-free photonic biosensors fabricated with low-loss hydrogenated amorphous silicon resonators

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