Fabrication of Pb(Zr,Ti)O₃ Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(DPM)₂, Zr(MMP)₄ and Ti(MMP)₄

Abstract

Ferroeleclric PZT thin films were deposited by liquid delivery MOCVD using a iiovelcocktail solution. The Locktail solution consisted of Pb(DPM);. Zr(MMP).i and Ti(MMP)4 diluted with ECH. This cocktail solution was stahle at least 6 months and perfectly vaporized above 270C. The precursors of the constiliieni ol' this c(x;ktaii solution hild close ihermal decomposition temperatures. Although the deposited films were crystallized into perovskile PZT phase at the substrate temperatures ranging from475'C to6<)0''C. theonly HInisdepositedat the substrate temperature ot'SSO^C were crystallized into perovskite PZT single pha.se. The PZT thin films deposited at the substrate temperature of 550 C showed good hysteresis properties with the 2^, ol 72 /iC/cm^ and the 2£, of 144 kV/cm.