Fabrication of Ferroelectric Pb(Zr,Ti)O₃ Thin Films by Spray Metalorganic Chemical Vapor Deposition

Abstract

Ferroelectric Pb(Zr,Ti)O 3 (PZT) thin films were fabricated on Pt-coated Si substrates by spray metalorganic chemical vapor deposition under atmospheric pressure. PZT films deposited at 450 C crystallized into a single-phase perovskite with random orientation by postannealing at 650 C. Pt/PZT/Pt capacitors showed hysteresis and their 2-fold remanent polarization and 2-fold coercive field were 29.8 mC/cm 2 and 63.0 kV/cm, respectively.