Fabrication of Microstructures in LTCC Technology Using Selective Laser Ablation

Shafique, Muhammad Farhan; Steenson, D.P.; Robertson, I.D.

doi:10.1109/tcpmt.2015.2426720

Cited by 5 publications

(4 citation statements)

References 26 publications

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“…The possibility of integrating electronic wirings, magnetic or piezoelectric components, and thick-film passive elements in 3D mechanical structures complements the benefit array of this technology. Therefore, LTCC is widely used in environmental resisted, multilayer, high frequency circuits, sensors, actuators, micro-systems, etc [8,[31][32][33]. Since micro-fluidic channel and chamber systems together with actuators, sensors, and electronic circuits can be bound in a common multilayer structure, the great opportunity to create sophisticated platforms for micro-reactors appears.…”

Section: Low Power Ltcc Flow Sensormentioning

confidence: 99%

“…Further improvement can consist in applying the laser technique to form different shapes in multilayer structures (especially in the chamber part). The most sophisticated seems to be the laser ablation in which an infrared beam is used to precisely ablate surface of an unfired LTCC stack of green tapes [33]. The depth of ablation depends on applied process parameters like power, head speed, pulse repetition rate, etc.…”

Section: Low Power Ltcc Flow Sensormentioning

confidence: 99%

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LTCC Flow Sensor with RFID Interface

Węglarski

Jankowski-Mihułowicz

Pitera

et al. 2020

Sensors

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The idea of battery-less flow sensors and their implementation in wireless measurement systems is presented in this research article. The authors take advantage of their latest achievements in the Low Temperature Co-fired Ceramic (LTCC) technology, RadioFrequency Identification (RFID) technique, and increasing availability of low power electronics in order to get rid of the need to use electrochemical cells in a power supply unit of the elaborated device. To reach this assumption, special care has to be put on the energy balance in such an autonomous sensor node. First of all, the new concept of an electromagnetic LTCC turbine transducer with a signal conditioner which only draws a current of around 15 µA, is proposed for measuring a flow rate of fluids. Next, the autonomy of the device is showed; measured data are gathered in a microcontroller memory and sent to a control unit via an RFID interface which enables both information exchange and power transfer. The energy harvested from the electromagnetic field is used to conduct a data transmission, but also its excess can be accumulated, so the proposed sensor operates as a semi-passive transponder. The total autonomy of the device is achieved by implementing a second harvester that continually gathers energy from the environmental electromagnetic field of common active radio systems (e.g., Global System for Mobile Communications (GSM), wireless network Wi-Fi).

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Section: Low Power Ltcc Flow Sensormentioning

confidence: 99%

Section: Low Power Ltcc Flow Sensormentioning

confidence: 99%

LTCC Flow Sensor with RFID Interface

Węglarski

Jankowski-Mihułowicz

Pitera

et al. 2020

Sensors

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“…These include photo‐imageable pastes, etching of thick film paste on LTCC and laser structuring. These techniques enabled structure resolutions in sub‐10 μm range, which is well below the standard screen printing resolution 8–11 …”

Section: Introductionmentioning

confidence: 97%

“…These techniques enabled structure resolutions in sub-10 µm range, which is well below the standard screen printing resolution. [8][9][10][11] This paper describes a technique of transfer technology for realizing high-resolution microstructures on LTCC. Previously, US patents have described methods for producing high-density, fine circuit pattern printed circuit boards using such transfer technology.…”

Section: Introductionmentioning

confidence: 99%

High‐resolution patterning on LTCC by transfer of photolithography‐based metallic microstructures

Supreeti,

Fischer,

Fritz

et al. 2023

Int J Applied Ceramic Tech

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The growing applications and constant miniaturization of electronic devices and of low‐temperature co‐fired ceramics (LTCC) in various fields, such as aviation, telecommunications, automotive, satellite communications, and military, have led to an increase in the demand for LTCC. Such prospects arise due to the continuous scaling down of components and high‐density interconnection in electronics packaging. This paper reports a technique for the transfer of high‐resolution microstructures from silicon substrates to LTCC. In this method, gold and copper patterns were formed by photolithography, electrodeposition, and residual layer stripping on silicon substrate. Lithography provides the opportunity to create and transfer complex patterns for use in several different applications and electroplating enables the use of pure metal for excellent electrical properties. The developed structures were transferred onto a top layer of LTCC tape using hot embossing. Then, the subsequent layers were stacked, laminated, and sintered. A resolution of 1.5 μm after free sintering and 4.5 μm after pressure‐assisted sintering was achieved. This distinctive method can be useful for several applications requiring high‐resolution and superior electrical properties.

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Design, simulation and fabrication of LTCC-based microhotplate for gas sensor applications

Kulhari

Khanna

2018

Microsyst Technol

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Fabrication of Microstructures in LTCC Technology Using Selective Laser Ablation

Cited by 5 publications

References 26 publications

LTCC Flow Sensor with RFID Interface

LTCC Flow Sensor with RFID Interface

High‐resolution patterning on LTCC by transfer of photolithography‐based metallic microstructures

Design, simulation and fabrication of LTCC-based microhotplate for gas sensor applications

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