Purpose
Low temperature co-fired ceramics (LTCC) technology-based micro-hotplates are of immense interest owing to their ruggedness, high temperature stability and reliability. The purpose of this paper is to study the role of thermal mass of LTCC-based micro-hotplates on the power consumption and temperature for gas-sensing applications.
Design/methodology/approach
The LTCC micro-hotplates with different thicknesses are designed and fabricated. The role of thermal mass on power consumption and temperature of these hotplates are simulated and experimentally studied. Also, a comparison study on the performance of LTCC and alumina-based hotplates of equivalent thickness is done. A thick film-sensing layer of tin oxide is coated on LTCC micro-hotplate and demonstrated for the sensing of commercial liquefied petroleum gas.
Findings
It is found from both simulation and experimental studies that the power consumption of LTCC hotplates was decreasing with the decrease in thermal mass to attain the same temperature. Also, the LTCC hotplates are less power-consuming than alumina-based one, owing to their superior thermal characteristics (low thermal conductivity, 3.3 W/ [m-K]).
Originality/value
This study will be beneficial for designing hotplates based on LTCC technology with low power consumption and better stability for gas-sensing applications.
Low temperature co‐fired ceramic (LTCC) micro‐hotplates show wide applications in gas sensors and micro‐fluidic devices. It is easily structured in three‐dimensional structures. This paper presents the low power consumption micro‐hotplates which were developed with PTC (positive temperature coefficient) temperature sensor and inter‐digitated electrodes. The paper presents two different structures for micro‐hotplate with platinum as a heating element. The PTC temperature sensor using two different materials viz. PdAg and platinum paste are developed with micro‐hotplates. The simulation has been achieved through COMSOL for LTCC and alumina micro‐hotplates. The temperature variation with power consumption has been measured for the developed LTCC micro‐hotplates. The change in resistance of PTC temperature sensors was measured with micro‐hotplate temperature. The aim of this study was to place a temperature sensor with the gas sensor module to measure and control the temperature of micro‐hotplate. A SnO2 sensing layer is coated on LTCC micro‐hotplate using screen printing and characterized for the sensing of carbon monoxide gas (CO). This study will be beneficial for designing hotplates based on LTCC technology with low power consumption and better stability of temperature for gas‐sensing applications.
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