Fabrication of microcomponents using ultraprecision machine tools

Abstract

The fabrication of microcomponents or microstructured surfaces with conventional manufacturing methods-such as turning, milling or drilling-imposes high demands on the machine behavior. The high requirements in terms of machine characteristics are currently met by only few ultraprecision machine tools. A broad range of materials such as, for example, non-ferrous metals or plastics can be machined, producing real three-dimensional structures with an optical surface quality

Design of ultraprecision machine tools with applications to manufacture of miniature and micro components

“…The piezoelectric actuator combined with mechanical flexure hinge is often used for positioning control of the diamond cutting tool. More recently, Fast Tool Servo (FTS) system has been introduced for diamond turning components and products with structured and non-rotationally symmetric surfaces such as laser mirrors, ophthalmic lenses and lenses molds, etc [11].…”

“…Friction drive is very predictable and reproducible due to a prescribed level of preload at the statically determinate wheel contacts, thereby superior in machining optically smooth surfaces. One of the good applications of friction drives is on the UPM 3 with a friction wheel drive for X axis, which has form accuracy less than 0.2 μm/100 mm as achieved [11]. Linear motor drives can offer the system designer an elegant alternative in that they produce linear motion directly and therefore eliminate the need for conversion mechanisms such as lead-screws, belt drives, and rack & pinions, with potentially better performance in terms of stiffness, acceleration, speed, smoothness of motion, accuracy and repeatability, etc [28].…”

“…Fig. 14 shows a surface-structured mirror turned by Fast Tool Servo on an ultraprecision lathe [11]. The surface of the mirror consists of a rotationally symmetrical part on which a nonrotationally symmetrical surface with 90 facets is superimposed.…”

“…The surface of the mirror consists of a rotationally symmetrical part on which a nonrotationally symmetrical surface with 90 facets is superimposed. The mirror is used as an integrator optic to enhance the beam quality in high power lasers [11].…”

Development of a precision machine to perform and study orthogonal micro-cutting

“…The flexibility and efficiency of micro-cutting processes using miniature cutting tools allow for the economical fabrication of smaller batch sizes compared with other processes [2]. For instance, micro-milling allows fabrication of truly 3D surfaces that can otherwise not be produced by other competing processes, such as photolithograpy.…”