Polymer microfabrication methods for microfluidic analytical applications

Becker, Holger; Gärtner, Claudia

doi:10.1002/(sici)1522-2683(20000101)21:1<12::aid-elps12>3.0.co;2-7

Cited by 733 publications

(427 citation statements)

References 47 publications

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“…Therefore, a mass production process with high replication accuracy needs to be developed for such devices. Polymer is the most promising material for both MEMS and Microsystems, due to its low cost, available fabrication technologies and wide range of mechanical and optical properties and chemical resistances, etc [9]. On the basis of conventional injection molding technology, micro injection molding has demonstrated itself to be a key enabling fabrication technology for mass production of polymer micro components with complex shapes and products with high quality surface features, e.g.…”

Section: Introductionmentioning

confidence: 99%

Replication of micro/nano-scale features by micro injection molding with a bulk metallic glass mold insert

Zhang

Chu

Byrne

et al. 2012

J. Micromech. Microeng.

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Abstract. The development of MEMS and Microsystems needs a reliable massproduction process to fabricate micro components with micro/nano scale features. In our study, we used the micro injection molding process to replicate micro/nano scale channels and ridges from a Bulk Metallic Glass (BMG) cavity insert. High density polyethylene (HDPE) was used as the molding material and Design of Experiment (DOE) was adopted to systematically and statistically investigate the relationship between machine parameters, real process conditions and replication quality. The peak cavity pressure and temperature were selected as process characteristic values to describe the real process conditions that material experienced during the filling process. The experiments revealed that the replication of ridges, including feature edge, profile and filling height, was sensitive to the flow direction; cavity pressure and temperature both increased with holding pressure and mold temperature; replication quality can be improved by increasing cavity pressure and temperature within a certain range. The replication quality of micro/nano features is tightly related to the thermomechanical history of material experienced during the molding process. In addition, the longevity and roughness of the BMG insert was also evaluated based on the number of injection molding cycles.

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Section: Introductionmentioning

confidence: 99%

Replication of micro/nano-scale features by micro injection molding with a bulk metallic glass mold insert

Zhang

Chu

Byrne

et al. 2012

J. Micromech. Microeng.

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“…The extended length in Å of grafted alkyl silanes can be estimated from this theoretical equation [87] l theo = (n 1 9/8)61.265 (4) where l theo is the theoretical length for a fully CH 3 -terminated extended chain containing n -CH 2 -. Other formula can be found in the literature, which takes in account the projections for the Si-O bonds [83].…”

Section: Specific Case: Siloxane Samsmentioning

confidence: 99%

“…Nowadays, the interest of researchers in bioanalysis is turning toward microfluidic devices, or "lab-on-a-chip" systems. This field has stimulated "extremely fertile imaginations", including several aspects including fluid flow control [1][2][3], chip microfabrication, and architecture [4]. As compared with CE, microfabricated systems provide much more flexibility in their design, since complex channel networks can be made without the complexity and dead volumes of capillary connectors.…”

Section: Introductionmentioning

confidence: 99%

Surface treatment and characterization: Perspectives to electrophoresis and lab‐on‐chips

et al. 2006

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The control and modification of surface state is a major challenge in bioanalytical sciences, and in particular in electrokinetic separation methods, due to the importance of electroosmosis. This topic has gained recently a renewed interest, associated with the development of "lab-on-chips" systems that extend the range of materials in which separation channels are fabricated. The surface science community has developed through the years a large toolbox of characterization tools and surface modification protocols, which is not yet fully exploited in the bioanalytical world. In this paper, we try and present an overview of these tools, in order to stimulate new ideas for improved and more controlled surface treatment strategies for separations in capillaries and microchannels. We briefly describe some physical and chemical aspects of electroosmosis (global and spatially resolved), streaming current, and streaming potential. We also review the main strategies for surface coating, and compare the advantages of physisorption, well-organized thin self-assembled monolayers, or conversely thick polymer "brushes". Examples of existing applications to electrophoresis in microchannel are also given.

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“…Processes used for microstructuring polymer materials for microsystem applications include replication methods and direct techniques [4]. Replication methods involve a patterning step using the so-called master, whereas in direct techniques no such step is necessary.…”

Section: Introductionmentioning

confidence: 99%

Acrylated hyperbranched polymer photoresist for ultra-thick and low-stress high aspect ratio micropatterns

Schmidt¹,

Yi²,

Jin³

et al. 2008

J. Micromech. Microeng.

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Different photocurable acrylates, including two hyperbranched monomers, are compared with an epoxy negative-tone photoresist (SU-8) with respect to their suitability for the fabrication of ultra-thick polymer microstructures in a photolithographic process. To this end, a resolution pattern was used and key parameters, such as the maximum attainable thickness and aspect ratio, the minimum resolution and the processing time were determined. Compared to SU-8, all acrylate materials allowed the fabrication of thicker layers with a fast single layer fabrication procedure. Microstructures with thicknesses of up to 850 µm, an aspect ratio of up to 7.7, a 5.5-fold reduction in internal stress and a 6-fold reduction in processing time compared to SU-8 were demonstrated using an acrylated hyperbranched polyether. The specific development process of the hyperbranched polymer combined with channel design moreover enabled us to produce a high-performance valve for micro-battery devices.

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Polymer microfabrication methods for microfluidic analytical applications

Cited by 733 publications

References 47 publications

Replication of micro/nano-scale features by micro injection molding with a bulk metallic glass mold insert

Replication of micro/nano-scale features by micro injection molding with a bulk metallic glass mold insert

Surface treatment and characterization: Perspectives to electrophoresis and lab‐on‐chips

Acrylated hyperbranched polymer photoresist for ultra-thick and low-stress high aspect ratio micropatterns

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