Fabrication of low-gate-current triode field emitters with planar carbon nanoparticle cathodes

Abstract

Articles you may be interested inHigh-current, low-cost field emission triode using a reticulated vitreous carbon cathode J. Vac. Sci. Technol. B 28, C2C37 (2010); 10.1116/1.3305455Double-gate field emitters with planar carbon-nanoparticle cathodes: Simulation studiesWe modified the structure of triode field emitters with planar carbon nanoparticle cathodes to reduce the gate currents. As it turned out, a simple insertion of an extra metal layer between the gate insulator and the cathode layer was sufficient for the substantial reduction of gate currents; the gate currents of the triode emitter with the modified structure never exceeded 4% of the anode currents up to anode currents of ϳ250 nA, corresponding to a gate voltage of 67 V and an anode voltage 900 V. The fabrication of the modified triode structure required only four extra processing steps, compared to that of conventional triode structure, while using only conventional photolithography with a single mask. We were able to account for the gate-current reduction in terms of the modification in the electric field distribution.

Fabrication and operation of triode electron emitters as ion source for miniature mass spectrometer

“…[6][7][8][9][10][11] It should be emphasized that triode electron emitters are ideal to realize micro-TOF MS because they are fabricated via a microfabrication process, operated with gate-bias voltages suitable for electron-impact ionization, 12 and are compatible with pulsemode operation. In a number of previous papers, we reported that CNPs had excellent field-emission properties.…”

Self-aligned cathodes in recessed geometry for reduced gate currents in nanostructured carbon triodes

“…8,9 In the case of conventional-structure emitters, due to the radial variation of electric field on planar-cathode surfaces, most of the emission currents originated from the region near the carbon-cathode edge, and emitted electrons were defocused. 8,9 In the case of conventional-structure emitters, due to the radial variation of electric field on planar-cathode surfaces, most of the emission currents originated from the region near the carbon-cathode edge, and emitted electrons were defocused.…”

“…8,9 In the case of conventional-structure emitters, due to the radial variation of electric field on planar-cathode surfaces, most of the emission currents originated from the region near the carbon-cathode edge, and emitted electrons were defocused. 9 The reduction of gate currents was realized through the modification of cathode-surface electric field with judicial selection of second-gate thickness. The lowest gate current we have achieved was four times larger than the anode current.…”