Fabrication of a soft x-ray microscope mirror using an epoxy replication method

Chon, Kwon Su; Namba, Yoshiharu; Kim, Kyong-Woo; Kang, Sung-Hoon; Yoon, Kwon‐Ha

doi:10.1117/1.2829608

Cited by 9 publications

(6 citation statements)

References 13 publications

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“…Electroless nickel is an excellent material to use in SPDT because of its amorphous structure. 5 Electroless nickel is also widely used in industrial and optical applications 6,7 and is one of the best optical substrates for use in soft xray mirrors and synchrotron optics. 8 Diamond is one of the hardest materials.…”

Section: Introductionmentioning

confidence: 99%

Wear inspection of a single-crystal diamond tool used in electroless nickel turning

2014

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Single-point diamond turning is a useful optical fabrication method for simultaneously obtaining a smooth surface and generating an accurate shape. Generally, a single-crystal diamond tool has been used in the single-point diamond turning method and a degree of the wear on the diamond tool is unavoidable. Tool wear causes the degradation of the surface quality, surface roughness, and shape accuracy of the workpiece. Inspection of tool wear is important in improving the surface quality. A single-crystal diamond tool used in electroless nickel turning was inspected by a laser scanning microscope and a scanning probe microscope. Regular grooves were observed on the flank face of the diamond tool, and the pitch interval was the same as the feed rate. The worn distance was obtained by measuring the clearance angle and the groove length on the flank face of the worn diamond tool. The worn distance of the diamond tool was 1.7 μm after machining electroless nickel for a 3.18 km cutting distance. The worn distance could also be obtained using the worn width on the flank face and the nose radius and was 2.05 μm, which was very close to 1.7 μm. Two methods based on the wear measurement of the flank face will be new methods to measure the worn distance of the single-crystal diamond tool.

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Section: Introductionmentioning

confidence: 99%

Wear inspection of a single-crystal diamond tool used in electroless nickel turning

2014

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“…13 The required surface shapes have been fabricated using various methods. 24,26,27 Multilayer coatings and X-ray optics have also been employed in space X-ray observatories such as CHANDRA. 28 In the present paper we describe a KB microscope optimized for simultaneously observing emission from both embedded copper tracer layers and the main pulse interaction region.…”

Section: Introductionmentioning

confidence: 99%

Kirkpatrick-Baez microscope for hard X-ray imaging of fast ignition experiments

Friesen

Tiedje

Hey

et al. 2013

Review of Scientific Instruments

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A Kirkpatrick-Baez X-ray microscope has been developed for use on the Titan laser facility at the Lawrence Livermore National Laboratory in Fast Ignition experiments. It was developed as a broadband alternative to narrow band Bragg crystal imagers for imaging Kα emission from tracer layers. A re-entrant design is employed which allows for alignment from outside the chamber. The mirrors are coated with Pt and operate at a grazing incident angle of 0.5° providing higher resolution than an equal brightness pinhole and sufficient bandwidth to image thermally shifted characteristic Kα emission from heated Cu tracer layers in Fast Ignition experiments. The superpolished substrates (<1 Å rms roughness) had a final visible wavelength roughness of 1.7 Å after coating, and exhibited a reflectivity corresponding to an X-ray wavelength roughness of 7 ± 1 Å. A unique feature of this design is that during experiments, the unfiltered direct signal along with the one-dimensional reflections are retained on the detector in order to enable a live indication of alignment and incident angle. The broad spectral window from 4 to 9 keV enables simultaneous observation of emission from several spectral regions of interest, which has been demonstrated to be particularly useful for cone-wire targets. An experimentally measured resolution of 15 μm has been obtained at the center of the field of view.

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“…The other replication technique 0091-3286/2011/$25.00 C 2011 SPIE is epoxy replication. 5 Multilayer shells based on epoxy replication can be fabricated by using two different approaches: a. the metal-coated foil substrate was first produced by epoxy replication from a superpolished mandrel, and then was deposited with the multilayer, and b. the multilayer was first deposited on the superpolished mandrel and then was replicated to the foil substrate. The former approach has been used by InFOCμS (Ref.…”

Section: Introductionmentioning

confidence: 99%

Investigation of direct replication techniques on periodic multilayers

et al. 2011

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The direct replication of a periodic W/Si multilayer was investigated systematically. The W/Si multilayer was deposited by a high vacuum dc magnetron sputtering system. After deposition, the multilayer was transferred from the supersmooth mandrel onto a commercially available float glass substrate by the epoxy replication technique. The multilayer was characterized by the grazing incident x-ray reflectance (GIXR) measurement, atomic force microscope (AFM), and Zygo GPI interferometer before and after replication. The measured results showed that the multilayer structure and reflectivity were almost the same, and the surface roughness was 0.22 and 0.23 nm before and after replication, respectively. It was demonstrated that the W/Si multilayer was successfully replicated without modification of the structure, a significant increase of surface roughness, or apparent change of reflectivity. The optical figure of the substrate after replication experienced significant changes of many waves but was actually improved for this specific test. Future studies will focus on learning how to control the resulting optical figure of our replication process on a thin substrate. C 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).

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Fabrication of a soft x-ray microscope mirror using an epoxy replication method

Cited by 9 publications

References 13 publications

Wear inspection of a single-crystal diamond tool used in electroless nickel turning

Wear inspection of a single-crystal diamond tool used in electroless nickel turning

Kirkpatrick-Baez microscope for hard X-ray imaging of fast ignition experiments

Investigation of direct replication techniques on periodic multilayers

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