Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications

Rothuizen, H.; Drechsler, Ute; Genolet, G.; Häberle, W.; Lutwyche, M. I.; Stutz, R.; Widmer, R.; Vettiger, P.

doi:10.1016/s0167-9317(00)00366-x

Cited by 31 publications

(19 citation statements)

References 2 publications

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“…State-of-the-art of driving a microstage is usually based on electromagnetic (Cho and Ahn 2003; Rothuizen et al 2000), electrostatic (Jaecklint et al 1992;Kim et al 2003;Shutov et al 2003), electrothermal Yang et al 2005) and piezoelectric actuators (Gao et al 1999;Kudoh et al 1990). Each of them has its own characteristics.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterizations of a monolithic PZT microstage

Ono

Zhang

et al. 2006

Microsyst Technol

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This paper reports on the fabrication and characterizations of a monolithic Pb(ZrTi)O 3 (PZT) microstage with multi-degrees of freedom for high-precision positioning. The entire device is fabricated in a symmetrical arrangement from a PZT plate with a size of 15 · 15 · 0.8 mm 3 . Four actuation units with displacement amplification mechanisms are integrated in the structure. All the actuators can be driven individually which result in movements of a stage in different directions. The main fabrication steps include dicing, electroplating, lithography and laser machining. The performances of the displacement and the resonant frequencies of the microstage are simulated using a finite element method (FEM) with different dimensions. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.

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Section: Introductionmentioning

confidence: 99%

Fabrication and characterizations of a monolithic PZT microstage

Ono

Zhang

et al. 2006

Microsyst Technol

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“…Ψ 1h = A(k x , k y ) e −k xy z e i(k x x+k y y) region 1 (12) Ψ 2h = C(k x , k y ) sinh(k xy z) e i(k x x+k y y) region 2 (19) Ψ 3h = −A(k x , k y ) e k xy z e i(k x x+k y y) region 3…”

Section: Use Of the Model To Design A Meso-scale Actuatorunclassified

“…1b and 2 [11]. Several small-scale devices that use non-periodic arrays include probe-based data storage devices [12][13][14] and optical switches [15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Modeling 3D magnetic fields for precision magnetic actuators that use non-periodic magnet arrays

Golda

Culpepper

2008

Precision Engineering

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“…electromagnetic [13], electrostatic [14,15] or piezoelectric ones [16] have been implemented into the X-Y micro-stages to meet the requirements of fast and high-precision positioning of a micro-component, low energy consumption and low cost of the fabrication. Especially the electrostatic comb-drive actuators are widely used for this purpose due to their ability to provide highly linear, in-plane motion, in relatively large range (typically up to 50 m) and high precision level.…”

Section: Introductionmentioning

confidence: 99%