A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications

Laszczyk, Karolina; Bargiel, Sylwester; Gorecki, Christophe; Krezel, Jerzy; Dziuban, P.; Kujawińska, Małgorzata; Callet, Damien; Frank, Sven

doi:10.1016/j.sna.2010.06.020

Cited by 42 publications

(28 citation statements)

References 23 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The biases applied to the straight and curved sensors were then adjusted such that the magnitudes of the peak shown on the signal analyzer at the fundamental actuating frequency were matched. While the nanopositioner's electrostatic actuators also possess a nonlinear characteristic due to the quadratic relationship between voltage and actuation force [27], [28], this test was performed with the assumption that any assessed difference in linearity is purely due to the influence of the sensors. The signal analyzer output, shown in Fig.…”

Section: Resultsmentioning

confidence: 99%

Design and Analysis of Nonuniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement Sensing

Fowler

Bazaei

Moheimani

2013

J. Microelectromech. Syst.

View full text Add to dashboard Cite

Abstract-Conventional heaters used in microelectromechanical systems (MEMS) electrothermal displacement sensors typically feature a uniform cross section, which results in a nonuniform temperature profile. In this paper, electrothermal sensors with a shaped beam profile are introduced, with simulation results showing that a much flatter temperature distribution is achieved across the length of the heater. The proposed sensor design is implemented as the displacement sensor for a MEMS nanopositioner together with a more conventional electrothermal sensor design for comparative purposes. Experimental testing indicates that the shaped profile significantly improves upon the conventional sensor design in a number of areas, including sensitivity, linearity, and noise performance.[ 2012-0291]Index Terms-Displacement sensor, microelectromechanical systems (MEMS) electrothermal sensing, silicon thermal heaters.

show abstract

Section: Resultsmentioning

confidence: 99%

Design and Analysis of Nonuniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement Sensing

Fowler

Bazaei

Moheimani

2013

J. Microelectromech. Syst.

View full text Add to dashboard Cite

show abstract

“…The device is composed of five vertically stacked building blocks: top glass lid, silicon electrostatic comb-drive X-Y microactuator with integrated scanning microlens ML1, ceramic LTCC spacer, silicon electrostatic Z microactuators with integrated second scanning microlens ML2, and bottom glass lid with integrated focusing microlens ML3. The X-Y microactuator, described elsewhere [5], is a translation microstage with frame- in-the-frame architecture, which provides an independent movement of microlens in the range of ± 35µm using four combdrive actuators and a system of straight spring suspensions. The Z microactuator, described elsewhere [6] is based on a electrostatic parallel-plate actuation principle, in which the microlens is located in the center of a movable electrode.…”

Section: Architecture Of 3-d Microoptical Scannermentioning

confidence: 99%

3D micro-optical lens scanner made by multi-wafer bonding technology

et al. 2013

View full text Add to dashboard Cite

We present the preliminary design, construction and technology of a microoptical, millimeter-size 3-D microlens scanner, which is a key-component for a number of optical on-chip microscopes with emphasis on the architecture of confocal microscope. The construction of the device relies on the vertical integration of micromachined building blocks: top glass lid, silicon electrostatic comb-drive X-Y and Z microactuators with integrated scanning microlenses, ceramic LTCC spacer, and bottom lid with focusing microlens. All components are connected on the wafer level only by sequential anodic bonding. The technology of through wafer vias is applied to create electrical connections through a stack of wafers. More generally, the presented bonding/connection technologies are also of a great importance for the development of various silicon-based devices based on vertical integration scheme. This approach offers a space-effective integration of complex MOEMS devices and an effect ive integration of various heterogeneous technologies

show abstract

“…In the past decades, several forms of micromirrors have been investigated for optical applications and laser phonomicrosurgery, for example, electrostatic actuators [1][2][3][4][5][6][7][8], electrothermal actuators [9][10][11][12], piezoelectric actuators [13][14], electromagnetic actuators [15], acoustic actuators, pneumatics actuators, and shape memory alloys [16]. Electrostatic actuators are implemented in many applications such as accelerometers, scanning mirrors, photonics, televisions, and projectors.…”

Section: Introductionmentioning

confidence: 99%

“…Different geometries, shapes of comb, flexure hinges, spring suspension, and materials are investigated for a high range of motion, faster speed, and high dynamic response. Linear electrostatic comb-drives are implemented for several scanning micromirrors with in-plane motions [1][2][3][4][5][6][7][8]. The range of motion is up to 30 µm for two-axis stages.…”

Section: Introductionmentioning

confidence: 99%

Structural analysis and static responses of electrostatic actuators for 3-DOF micromanipulators in phonomicrosurgery

Pengwang

Rabenorosoa

Rakotondrabe

et al. 2015

2015 10th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)

View full text Add to dashboard Cite

While the searching for electrostatic actuators with large displacements is going on, this paper will demonstrate the parameters that influence the performances of linear electrostatic actuators. A comparison of theoretical calculations and experimental results for linear electrostatic actuators will also be presented for phonomicrosurgery. Theoretically, transverse displacement of electrostatic comb drive depends on supplied voltage, pull-in voltage, and length of spring suspension. In this study, two types of spring suspension (single beams and double-folded beams) are studied for different behaviors of linear electrostatic actuators. Normally, the folded-beam are implemented with the guilded-axis along at the center. There are still contradictions about the deflection of the single beam suspension and the folded-beam. Engineers and scientists predicted the deformations for their own designs. Some results show that the single beam can provide higher deformation, while the other reported the result for both design are relevant or higher. Calculations of stiffness and allowable transverse displacement are also compared to the simulation results among different types. The calculations are used for designing the performances of electrostatic actuators with a fitcurve for different parameters. Then, the experimental results indicate characteristics of linear electrostatic actuators for different suspension designs and different parameters. Next, these electrostatic actuators will be implemented for a 3-DOF (tip-tilt-piston) micromirror in phonomicrosurgery by using a micro-assembly approach with marker and assembly block to place three electrostatic combdrives in the precise position. With this development, MEMS-based micro-mirror designs can enhance capability of biomedical apparatus that require high speed, low power consumption, and high reliability.

show abstract

A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications

Cited by 42 publications

References 23 publications

Design and Analysis of Nonuniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement Sensing

Design and Analysis of Nonuniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement Sensing

3D micro-optical lens scanner made by multi-wafer bonding technology

Structural analysis and static responses of electrostatic actuators for 3-DOF micromanipulators in phonomicrosurgery

Contact Info

Product

Resources

About