Eurosensors 2018 2019
DOI: 10.3390/proceedings2130751
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Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters

Abstract: Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR variation to such a single-chip imaging system is described, including the integration of a metallic shield to minimize crosstalk, and two interference filters: a NIR blocking filter, and a NIR bandpass filter. This is then combined with standard polymer based RGB c… Show more

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Cited by 3 publications
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“…Key to this design is the MIM analyzer grating. As opposed to plasmonic hole and nanodisk array filters 31 34 , these MIM structures do not depend on spatial periodicity and thus can be laterally patterned on the wavelength scale. We begin with two MIM filters, green and red bandpass filters designed with HfO 2 dielectric thicknesses of d 1 = 70 nm and d 2 = 100 nm, respectively, sandwiched between two 30 nm thick silver layers (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Key to this design is the MIM analyzer grating. As opposed to plasmonic hole and nanodisk array filters 31 34 , these MIM structures do not depend on spatial periodicity and thus can be laterally patterned on the wavelength scale. We begin with two MIM filters, green and red bandpass filters designed with HfO 2 dielectric thicknesses of d 1 = 70 nm and d 2 = 100 nm, respectively, sandwiched between two 30 nm thick silver layers (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Vereecke et al. 82 fabricated compact and low-cost spectral sensors by integrating filters on a single chip based on commercially available image sensors (CMOS and CCD). They described the production of RGB and NIR change maps for such a single-chip imaging system.…”
Section: Advanced Techniques For Spectrometer Miniaturizationmentioning
confidence: 99%