Fabrication and properties of the He+-implanted K9 glass waveguide

Abstract

This work reports on the fabrication and characterization of a K9 glass planar waveguide structure. The helium ion implantation was employed to form the waveguide on the K9 glass. The choices of the energy of 0.4 MeV and the dose of [Formula: see text] ions/cm2 were conducted by the SRIM 2013. The [Formula: see text]-line spectroscopy and the modal profile of the He[Formula: see text]-irradiated K9 glass waveguide were performed by the prism-coupling system and the end-face coupling technique at 0.6328 [Formula: see text]m, which suggests the capability of light propagation. The He[Formula: see text]-implanted K9 glass waveguides can serve as potential candidates for advanced integrated optoelectronic devices.

Optical ridge waveguides in Nd3+‐doped fluorophosphate glasses fabricated by carbon ion implantation and femtosecond laser ablation

“…It induces a damage in the Nd:FPG and causes a decrease in density, resulting in a layer with a low refractive index. 26,27 Figure 4 shows the microscope image of the crosssection for the C 3+ -implanted and FS-ablated Nd:FPG ridge waveguide observed by a metallurgical microscope. The thickness of the waveguide layer is about 4.5 µm, which is almost the same as the theoretical depth of the maximum relative atom displacement calculated by the SRIM 2013.…”

“…Moreover, it is concentrated at the end of the ion track (∼4.50 μm), which is caused by the elastic collision between the implanted C 3+ ions and the nuclei of the target Nd:FPG. It induces a damage in the Nd:FPG and causes a decrease in density, resulting in a layer with a low refractive index 26,27 …”