One-dimensional and two-dimensional Er3+-doped germanate glass waveguides by combination of He+ ion implantation and precise diamond blade dicing

Liu, Chun-Xiao; Lu, Yan; Ding, Wei-Jie; You, Jia-Li; Zhang, Liao-Lin; Fu, Lili; Yue, Qing-Yang; Lin, Shu; Zhou, Yan-Jun

doi:10.1016/j.vacuum.2022.111743

Cited by 6 publications

(4 citation statements)

References 32 publications

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“…The light intensity profile of this waveguide mode is discontinuous, probably due to the roughness of the waveguide surface caused by the poor polishing. Furthermore, the propagation loss is estimated to be 2.2 dB cm −1 on the basis of end-face coupling devices [24,25]. It is obtained by the formula: α = −[10•lg(I out /I in )]/l, where the input power I in = 5.1 mW, the output power I out = 3.1 mW, the length of the waveguide l = 10 mm.…”

Section: Resultsmentioning

confidence: 99%

Characterization of optical waveguides in Ce³⁺-doped phosphate glasses formed by He⁺ion implantation

Lu,

Chen,

Zhang

et al. 2023

Phys. Scr.

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In this work, the Ce3+-doped phosphate glass is carried out to fabricate the planar waveguides by the 400 keV He+ ion implantation with a dose of 6.0 × 1016 ions cm−2. The dark-mode spectrum of the waveguide at a wavelength of 632.8 nm is obtained by the prism coupling technique. The SRIM 2013 software is used to analyze the energy deposition induced by the ion implantation and the RCM is employed to reconstruct the refractive index profile of the planar waveguide. The end-face coupling technique is applied to the measurement of the propagation mode image of the waveguide at 632.8 nm. The Ce3+-doped phosphate glass waveguide has the potential for an integrated optical device.

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Section: Resultsmentioning

confidence: 99%

Characterization of optical waveguides in Ce³⁺-doped phosphate glasses formed by He⁺ion implantation

Lu,

Chen,

Zhang

et al. 2023

Phys. Scr.

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“…The Er 3+ -doped germanate glass is cut into a plane-parallel square plate with the dimension of 5.0 mm × 10.0 mm × 2.0 mm and polished to optical grade quality. In addition, a more detailed experimental protocol for the synthesis of the Er 3+ -doped germanate glass is reported in [25] by our co-author [26].…”

Section: Methodsmentioning

confidence: 99%

“…Due to the excellent characteristics of transparency and fluorescence, many researchers have devoted their energy to constructing waveguides on the Er 3+ -doped germanate glass [22]. For example, the fabrication of optical waveguides by ion implantation on this glass has experimented with both H + ions and He + ions [23][24][25]. However, the ions at high concentration (a dose of 8.0 × 10 16 ions cm −2 for the H + implantation and a fluence of 6.0 × 10 16 ions cm −2 for the He + implantation) may form bubbles resulting in blistering and exfoliation.…”

Section: Introductionmentioning

confidence: 99%

Optical properties of the O³⁺-ion implanted and femtosecond-laser ablated ridge waveguide in the Er³⁺-doped germanate glass

Zhao,

Ni,

Huo

et al. 2024

Phys. Scr.

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Er3+-doped germanate glass is a kind of polyfunctional material for optical and photonic applications. The work reports on the preparation and properties of O3+-ion implanted and femtosecond-laser ablated Er3+-doped germanate glass optical ridge waveguide. The energy is 6.0 MeV and the fluence is 5×1014 ions/cm2 for the O3+-ion implantation. The pulse energy and the scanning speed of the femtosecond-laser ablation are 3 μJ and 50 μm/s, respectively. The SRIM 2013 is used to calculate the vacancy profile induced by the implantation in the Er3+-doped germanate glass for the physical mechanisms of the waveguide formation. The optical microscopy images of the cross-section of the waveguide are captured by the Nikon microscope. The light-guiding properties of the ion-implanted and laser-ablated waveguides are studied by the end-face coupling system. The ridge waveguide has been produced by combining the FS ablation with ion implantation technologies for the first time in the Er3+-doped germanate glass. The propagation of light field indicates that it has the potential for photonics applications based on the planar and ridge Er3+-doped germanate glass waveguides.

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“…Optoelectronic glass doped with rare-earth ions is expected to realize miniaturized and integrated light sources [12]. The Er 3+ -doped germanate glass combines the advantages of the Er 3+ ion (such as, telecommunication windows and large uorescence bands) [13] and the germanate glass (such as, high chemical durability and wide transparency range) [14]. Therefore, it has higher emission quantum e ciency, lower phonon energy, and larger refractive index, compared with traditional Er 3+ -doped oxide glasses including Er 3+ -doped silicate glasses and Er 3+ -doped phosphate glasses [15].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and optical properties of the oxygen-ion implanted waveguides in Er 3+ -doped germanate glasses

Zhao

Zhu

et al. 2023

Preprint

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In this work, the planar optical waveguide on the Er3+-doped germanate glass was fabricated by the oxygen ion implantation with the energy of 6.0 MeV and the fluence of 5×1014 ions/cm2. The waveguide was characterized with the techniques of the m-line setup and the near-field pattern. The waveguide shows guided-mode propagation at a wavelength of 632.8 nm. The formation theory of the planar waveguide was discussed through simulating the energy loss distribution and analyzing the reconstructed refractive index profile. The ion implantation results in around 4.8 µm thickness of higher refractive index layer to guide light as a waveguide core in the Er3+-doped germanate glass, which could be used for applications in future integrated optical systems.

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One-dimensional and two-dimensional Er3+-doped germanate glass waveguides by combination of He+ ion implantation and precise diamond blade dicing

Cited by 6 publications

References 32 publications

Characterization of optical waveguides in Ce³⁺-doped phosphate glasses formed by He⁺ion implantation

Characterization of optical waveguides in Ce³⁺-doped phosphate glasses formed by He⁺ion implantation

Optical properties of the O³⁺-ion implanted and femtosecond-laser ablated ridge waveguide in the Er³⁺-doped germanate glass

Fabrication and optical properties of the oxygen-ion implanted waveguides in Er 3+ -doped germanate glasses

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One-dimensional and two-dimensional Er3+-doped germanate glass waveguides by combination of He+ ion implantation and precise diamond blade dicing

Cited by 6 publications

References 32 publications

Characterization of optical waveguides in Ce3+-doped phosphate glasses formed by He+ion implantation

Characterization of optical waveguides in Ce3+-doped phosphate glasses formed by He+ion implantation

Optical properties of the O3+-ion implanted and femtosecond-laser ablated ridge waveguide in the Er3+-doped germanate glass

Fabrication and optical properties of the oxygen-ion implanted waveguides in Er 3+ -doped germanate glasses

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Characterization of optical waveguides in Ce³⁺-doped phosphate glasses formed by He⁺ion implantation

Characterization of optical waveguides in Ce³⁺-doped phosphate glasses formed by He⁺ion implantation

Optical properties of the O³⁺-ion implanted and femtosecond-laser ablated ridge waveguide in the Er³⁺-doped germanate glass