2023
DOI: 10.1088/1402-4896/acfeb3
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Characterization of optical waveguides in Ce3+-doped phosphate glasses formed by He+ion implantation

Yan Lu,
Yang-Zhi Chen,
Liao-Lin Zhang
et al.

Abstract: In this work, the Ce3+-doped phosphate glass is carried out to fabricate the planar waveguides by the 400 keV He+ ion implantation with a dose of 6.0 × 1016 ions cm−2. The dark-mode spectrum of the waveguide at a wavelength of 632.8 nm is obtained by the prism coupling technique. The SRIM 2013 software is used to analyze the energy deposition induced by the ion implantation and the RCM is employed to reconstruct the refractive index profile of the planar waveguide. The end-face coupling technique is applied to… Show more

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Cited by 2 publications
(3 citation statements)
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“…Therefore, the waveguide can limit the propagation of light in the waveguide layer between the air and the optical barrier. 26 The measured effective refractive index is close to the calculated one based on the RCM. This indicates that the reconstructed refractive index distribution at 632.8 nm is reasonable for the H + -implanted Ce 3þ ∶GGG waveguide.…”
Section: Properties Of the Proton-implanted Ce 3+ :Ggg Waveguidesupporting
confidence: 71%
“…Therefore, the waveguide can limit the propagation of light in the waveguide layer between the air and the optical barrier. 26 The measured effective refractive index is close to the calculated one based on the RCM. This indicates that the reconstructed refractive index distribution at 632.8 nm is reasonable for the H + -implanted Ce 3þ ∶GGG waveguide.…”
Section: Properties Of the Proton-implanted Ce 3+ :Ggg Waveguidesupporting
confidence: 71%
“…Therefore, the waveguide structure is presented in the form of the core with the high index surrounded by the air and the optical barrier. 27,28 Figure 5A shows the end-view micrograph of the RTP 2D waveguide. It is about 4.3 μm in thickness, which approximately is the same as the implantation depth simulated by the SRIM 2013.…”
Section: Resultsmentioning
confidence: 99%
“…Moreover, an optical barrier with reduced refractive index is formed at a depth of 4.32 μm. Therefore, the waveguide structure is presented in the form of the core with the high index surrounded by the air and the optical barrier 27,28 …”
Section: Resultsmentioning
confidence: 99%