Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. 2004
DOI: 10.1109/icsict.2004.1434980
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Fabrication and integration of high performance mixed signal and RF passive components in 0.13/spl mu/m Cu BEOL technologies

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Cited by 6 publications
(1 citation statement)
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“…The LVTSCR is a well-known ESD protection structure with the low voltage triggering characteristics and the areaefficiency [7], [8]. Generally, SCR devices have much higher ESD robustness than other ESD devices such as diodes and ggNMOS (grounded-gate NMOS) [9]. Accordingly, the ESD clamp which uses this SCR device is relative small size and then makes less parasitic capacitance.…”
Section: Low Voltage Triggered Scr (Lvtscr)mentioning
confidence: 99%
“…The LVTSCR is a well-known ESD protection structure with the low voltage triggering characteristics and the areaefficiency [7], [8]. Generally, SCR devices have much higher ESD robustness than other ESD devices such as diodes and ggNMOS (grounded-gate NMOS) [9]. Accordingly, the ESD clamp which uses this SCR device is relative small size and then makes less parasitic capacitance.…”
Section: Low Voltage Triggered Scr (Lvtscr)mentioning
confidence: 99%