Fabrication and initial characterisation results of a micromachined biomimetic strain sensor inspired from the campaniform sensillum of insects

Wicaksono, Dedy H. B.; Pandraud, Gregory; Crăciun, G.; Vincent, Julian F. V.; French, Pim J.

doi:10.1109/icsens.2004.1426221

Cited by 7 publications

(5 citation statements)

References 2 publications

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“…The microstructure described in figure 5 is our initial work to mimic the natural campaniform sensillum [9,15]. Furthermore, fabrication and characterization of these structures will help elucidate the true mechanism of high sensitive strain sensing in the real campaniform sensillum, and confirm the modeling and numerical simulation results.…”

Section: Resultsmentioning

confidence: 81%

“…So, the strain to be detected comes from around the body of the structure, rather than from the vertically outside force, as commonly used in membrane-based pressure sensors. This combination of two structural features of the campaniform sensillum is our initial effort (see figure 2 and [9]) to develop a new strain sensor with better performance than currently available 'planar' strain sensors.…”

Section: Design and Fabricationmentioning

confidence: 99%

“…The membrane located inside a blind hole amplifies the strain. For a rather detailed discussion on the sensing mechanism, refer to [7], as well as to [9] for our previous report on the design and development strategy for a biomimetics MEMSbased strain sensor inspired from a campaniform sensillum.…”

Section: Introductionmentioning

confidence: 99%

“…In the case reported in this paper, this better sensitivity will be expected to come from its unique membrane-in-recess structure that amplifies and concentrates strain, in comparison to direct transducing found in most available planar-structure strain sensors. This paper describes the continuation of our work [9,15] to develop a MEMS-based strain sensor inspired from the campaniform sensillum of insects, especially those found in Calliphora vicina (the blowfly). This paper, however, will not describe a complete MEMS strain sensor with electrical read out.…”

Section: Introductionmentioning

confidence: 99%

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Biomimetic strain-sensing microstructure for improved strain sensor: fabrication results and optical characterization

Wicaksono

Vincent

Pandraud

et al. 2005

J. Micromech. Microeng.

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This paper describes the fabrication, and early optical characterization results of a new biomimetic strain-sensing microstructure. The microstructures were inspired from the campaniform sensillum, a highly sensitive strain sensor found in the exocuticle layer of insects. We investigate the natural strain-sensor characteristics by mimicking some of its simplest structural features. Blind-hole-and membrane-structural features were combined and fabricated as membrane-in-recess microstructure. To investigate the strain-sensing (or strain-amplifying) property of the microstructure, an optical characterization setup was devised based on the interference pattern formed by reflected laser beams from different surfaces of the microstructures. Preliminary qualitative analysis of the results obtained shows unsimilar intensity level changes as a function of spatial location on the membrane, thus indicated the biomimetic microstructure's strain-amplifying property. This property could be utilized for future improvement of currently available planar-based conventional strain sensors.

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Section: Resultsmentioning

confidence: 81%

Section: Design and Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Biomimetic strain-sensing microstructure for improved strain sensor: fabrication results and optical characterization

Wicaksono

Vincent

Pandraud

et al. 2005

J. Micromech. Microeng.

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“…A strain sensor based on the Campaniform sensillum of arthropods directly imitates the behavior of global strain amplification through composite materials, mitigating the need for multiple strain gauges (Skordos et al , 2002). Similarly, a micro strain sensor was fabricated via MEMS techniques to create a SiO 2 /SiN thin film over a membrane‐in‐recess (Wicaksono et al , 2004). Both of these designs improve upon current strain gauge sensor technology.…”

Section: Sensor Typesmentioning

confidence: 99%

An overview of biomimetic sensor technology

2009

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PurposeThe purpose of this paper is to provide an overview of the wide range of biomimetic sensor technology and innovations.Design/methodology/approachThe reader is introduced to biomimetic sensors, their types, their advantages and how they are different from traditional sensors. Background information is also provided regarding sensor design, inspiration and innovation.FindingsThere are two approaches to sensor design, which lead to diverse advantages and innovations. Classification of biomimetic sensors indicated which natural senses are underutilized by sensor designers and researchers.Originality/valueThe paper provides information of value for those seeking innovative sensor designs and research information for those who want to research in this area.

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