Fabrication and characterization of NbN, AlN and NbN/AlN/NbN on MgO substrates

Lee, Kang; Wu, Peiheng; Sh, Jeon; Cai, Weilin; Yang, Shuzhen; Ji, Zheng; Wang, Z

doi:10.1088/0953-2048/16/12/021

Cited by 11 publications

(4 citation statements)

References 15 publications

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“…Average roughness value of hydrated (1 0 0) surface was about 3 nm, which was almost the same for similar times with that of Delplacke-Ogletree et al [8].…”

Section: Resultssupporting

confidence: 86%

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Influence of crystallographic orientation on hydration of MgO single crystals

Sütçü¹,

Akkurt²,

Okur³

2009

Ceramics International

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This study has been performed in order to find out the influence of crystallographic orientation on hydration of MgO single crystal substrates with (1 0 0)-, (1 1 0)-, and (1 1 1)-orientations. The samples were left in a hydration chamber with an 88% relative humidity for 18 h at room temperature. The effect of humidity on the samples was examined by scanning probe microscope (SPM) and scanning electron microscope (SEM) which showed that the degree of hydration was noticeably influenced by the crystallographic orientation. It was found that the MgO with (1 1 1)-orientation has the highest tendency to hydrate than the other orientations. Second most affected sample was (1 1 0) crystal. Loss of MgO on the surface by hydration is most severe when the crystal is oriented in (1 1 1) plane with the maximum hydrate layer thickness of 174 nm after 18 h of exposure. #

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“…Average roughness value of hydrated (1 0 0) surface was about 3 nm, which was almost the same for similar times with that of Delplacke-Ogletree et al [8].…”

Section: Resultssupporting

confidence: 86%

“…1b). MgO single crystal substrates are also frequently used in epitaxial thin film growth [8,9]. Hence degradation of single crystal MgO by moisture related with storage conditions effects structural quality of thin films and devices made on MgO substrates for various microelectronic applications [10,11].…”

Section: Introductionmentioning

confidence: 99%

Influence of crystallographic orientation on hydration of MgO single crystals

Sütçü¹,

Akkurt²,

Okur³

2009

Ceramics International

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“…From this perspective, no differences among the four samples could be established. Previous reports [18,[35][36][37] on NbN thin films obtained by PVD or ALD processes demonstrated that the superconducting properties of the NbN thin films are strongly dependent on its lattice parameter; moreover, a larger value leads to a higher Tc. The lattice parameter depends on the chemical composition and vacancies of Nb or N, and the presence of O reduces the lattice parameter [31].…”

Section: Effect Of Annealing In Argonmentioning

confidence: 99%

Improved critical temperature of superconducting plasma-enhanced atomic layer deposition of niobium nitride thin films by thermal annealing

et al. 2020

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The efficiency of the superconducting radio frequency cavities composed of Nb required the deposition of thickness-controlled multilayer coatings of superconductor-insulator-superconductor (S-IS) on the internal surfaces of the cavities. Herein, we report the plasma-enhanced atomic layer deposition of carbon-free NbN (50 µm thick), followed by a thermal treatment, to obtain the superconducting layer in the S-IS structure. Using (tert-butylimido)-tris(diethylamino)-niobium as the niobium precursor and H 2 and NH 3 plasma as reactive gases, the deposition and annealing parameters were optimized by studying their effects on the film properties (crystallinity, density, and composition). We demonstrated that the superconducting critical temperature (Tc) can be improved after thermal annealing up to 13.8 K, a value compatible with the targeted application. In addition to the expected densified layers and increased grain size, we observed a partial transformation of the oxide present in the as-deposited layer into niobium oxynitride, which could indicate the origin of the improvement of the superconducting properties. With low carbon and oxygen impurity concentrations in the films, this study contributes to the understanding of the relationship between the structure, composition, and superconductivity in NbN.

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“…In the experiment, NbN thin films with a thickness of 5-6 nm were deposited on MgO(100) substrate by DC reactive magnetron sputtering under optimized conditions [20] . EBL and RIE were used to form a meander nanowire pattern, as shown in Figure 1.…”

mentioning

confidence: 99%