Extreme ultraviolet laser ablation of solid targets

Tallents, G. J.; Wilson, Sarah; Lolley, James; Aslanyan, V.; West, Andrew; Rossall, A. K.; Solis-Meza, Edourdo; Wagenaars, E.; Menoni, Carmen S.; Rocca, J. J.

doi:10.1117/12.2528736

Cited by 3 publications

(4 citation statements)

References 15 publications

(19 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Therefore, the surface of copper was melted and evaporated by the irradiation of the 46.9 nm laser. According to the results, the surface behavior induced by a 46.9 nm laser on copper differed from that on other types of materials, such as large bandgap dielectrics (PMMA [20], BaF 2 [12]) and multiple layers [9]. In the case of dielectrics, regardless of the type of organic or inorganic, the damage always induced by a non-thermal effect, leaving clear patterns with a certain depth and a clean edge.…”

Section: Resultsmentioning

confidence: 91%

“…The similar cracks were not observed in the damage of copper in this work because the material characteristic of copper is different from the multiple layers and also the fluence of the laser was lower which was not able to generate such a temperature difference. According to Reference [20], in the interaction of a 46.9 nm laser with solid targets, attenuation length was a crucial factor in determinate the damage mechanism, which was classified involving the traveling ionization wave of ablation and ablation threshold. Based on that statement, the damage that occurred on copper fits the former mechanism.…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Study of Thermal Effect in the Interaction of Nanosecond Capillary Discharge Extreme Ultraviolet Laser with Copper

et al. 2019

View full text Add to dashboard Cite

Interaction of Extreme Ultraviolet (EUV) laser with matters is an attractive subject since novel phenomena always occur under the effect of high energy photons. In this paper, the thermal effect involved in the interaction of a capillary discharge 46.9 nm laser with copper was studied theoretically and experimentally. The temperature variation of the laser-irradiated region of copper was calculated. According to the results, the copper surface was ablated obviously and presented the trace of melting, evaporation, and resolidification, which suggested the thermal effect occurred on the surface during the laser irradiation.

show abstract

Section: Resultsmentioning

confidence: 91%

Section: Resultsmentioning

confidence: 99%

Study of Thermal Effect in the Interaction of Nanosecond Capillary Discharge Extreme Ultraviolet Laser with Copper

et al. 2019

View full text Add to dashboard Cite

show abstract

“…Thus, understandings of the mechanism of materials ablation by intense EUV radiation is important issue. However, to date, not so many studies on EUV-matter interaction have been conducted [1][2][3]. One of the approaches to study the EUV ablation is to investigate the particles expanding from the ablation plasma, because they preserve information of the ablation plasma itself and comparably easy to measure.…”

Section: Introductionmentioning

confidence: 99%

Energy and charge distribution of Si ions in EUV ablation plasma

Tanaka¹,

Deguchi²,

Wada³

et al. 2021

International Conference on X-Ray Lasers 2020

View full text Add to dashboard Cite

Recent developments on high-power compact extreme ultraviolet (EUV or XUV) sources have enabled us to study the materials ablation induced by the irradiation of intense EUV light. The interactions of EUV light with matters along the ablation have potential advantage for the use in advanced materials processing. We have studied the charge states and their energy distributions in the EUV ablation plasma using an E´B mass-charge analyzer. The measurement was also conducted for conventional laser ablation plasma induced by a 1064 nm Nd:YAG laser. The results showed noticeable difference between EUV and laser ablations, where EUV ablation only showed singly charged Si ions, and laser ablation showed multiply charged ions up to Si 3+ . The energy spectra of multiply charged ions were distributed in higher energy range. It has been predicted that EUV ablation plasma have higher electron density close to the solid density and lower electron temperature at 1 to few eV, while laser ablation plasma generally has lower electron density around the critical density and higher electron temperature exceeding 10 eV mainly by inverse bremsstrahlung absorption at an irradiation intensity around 10 9 W/cm 2 range. Thus, ionization did not proceed much and only singly charged ions were detected for EUV ablation and the electron impact ionization proceeded to have multiply charged ions for laser ablation. This study showed that the experimental results reflected the general characteristics of the ablation plasma, and showed possibilities of modeling of entire EUV ablation dynamics from expanding ions.

show abstract

“…Such lasers allowed to conduct a series of significant basic and applied research in various fields, including dense plasma diagnostics [10], high-resolution imaging and microscopy [11], lithography [12], time-of-flight spectroscopy with single-photon ionization [13]. More recently ablation of solid targets with the 46.9 nm laser was considered for high-resolution mass spectrometry [14,15], manufacturing microelectromechanical systems [16,17] and generation of warm dense matter [18]. Work on extending operation of discharge-based lasers into the shorter wavelength range using recombination pumping in a nanosecond capillary discharge in nitrogen [19][20][21][22][23] is currently undergoing.…”

Section: Introductionmentioning

confidence: 99%

Plasma dynamics at the preionization stage in discharge-based EUV lasers

Eliseev¹,

Timshina²,

Samokhvalov³

et al. 2020

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

In this paper we present the results of a detailed numerical investigation of plasma formed at the preionization stage of extreme ultraviolet (EUV) lasers based on nanosecond capillary discharges. Despite the general consensus that preliminary ionization is one of the features that have originally allowed creating stable and efficient lasers operated in argon-filled capillaries, little attention has been paid to the observed sensitivity of their performance to the properties of the preionizing current pulse. The goal of present studies was to obtain basic description of preliminary plasma state that could be used for interpretation of available experimental data on the subject. The numerical model was based on the hydrodynamic ‘fluid’ approach coupled with the heat transfer, the continuity and the Navier–Stokes equations. Preliminary discharge dynamics for conditions typical of an argon EUV laser is illustrated in detail, starting from the initial breakdown, taking the form of a fast ionization wave, to formation of a self-sustaining nonequilibrium plasma column. It is shown that a few microseconds after application of the prepulse a concave gas density profile is formed that can potentially be a factor influencing plasma compression and emission during the main stage of a capillary discharge.

show abstract

Extreme ultraviolet laser ablation of solid targets

Cited by 3 publications

References 15 publications

Study of Thermal Effect in the Interaction of Nanosecond Capillary Discharge Extreme Ultraviolet Laser with Copper

Study of Thermal Effect in the Interaction of Nanosecond Capillary Discharge Extreme Ultraviolet Laser with Copper

Energy and charge distribution of Si ions in EUV ablation plasma

Plasma dynamics at the preionization stage in discharge-based EUV lasers

Contact Info

Product

Resources

About