2019
DOI: 10.3390/app10010214
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Study of Thermal Effect in the Interaction of Nanosecond Capillary Discharge Extreme Ultraviolet Laser with Copper

Abstract: Interaction of Extreme Ultraviolet (EUV) laser with matters is an attractive subject since novel phenomena always occur under the effect of high energy photons. In this paper, the thermal effect involved in the interaction of a capillary discharge 46.9 nm laser with copper was studied theoretically and experimentally. The temperature variation of the laser-irradiated region of copper was calculated. According to the results, the copper surface was ablated obviously and presented the trace of melting, evaporati… Show more

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Cited by 5 publications
(2 citation statements)
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“…The ablation was also studied by Cui H. et al [27] on copper samples, using a laser with a grazing incidence angle of 7 • (in the present study 3 • ), wavelength 46.9 nm, energy 50 µJ and 100 µJ with a pulse width of 1.7 ns. The pulse numbers were 1 to 6.…”
Section: Introductionmentioning
confidence: 75%
“…The ablation was also studied by Cui H. et al [27] on copper samples, using a laser with a grazing incidence angle of 7 • (in the present study 3 • ), wavelength 46.9 nm, energy 50 µJ and 100 µJ with a pulse width of 1.7 ns. The pulse numbers were 1 to 6.…”
Section: Introductionmentioning
confidence: 75%
“…The fringes depth of only several nanometers could be created onto highly sensitive photoresist with hundreds of laser shots exposure, which is not efficient for nano-scale laser processing. In our previous work, a toroidal bare mirror is used to focus the EUV laser [13,14]. The reflectivity reaches 90% because of the grazing incidence.…”
Section: Introductionmentioning
confidence: 99%