Experimental Research on Affect of Water Jet to Laser Compound Processing of Crystalline Silicon

Abstract

A wavelength of 1064nm Nd: YAG laser was used to groove on silicon, then studying the affect of quality and processing efficiency by incoming jet in laser etching course of silicon: Water jet reduced doss, cracks and other defects which might be produced on the surface of groove. Software of matlab was used to restore the topography of tank’s bottom; analysis shown that the water jet had a scouring effect influence on tank’s bottom. Introduction of the water jet caused the loss of the laser energy, but it could improve processing efficiency indirectly by blowing away the slag.