Experimental model of industrial x-ray source MSX-1 with a vacuum spark for x-ray lithography

Semyonov, Oleg G.; Gurey, A. E.; Tikhomirov, A. A.

doi:10.1116/1.1358886

Cited by 3 publications

References 9 publications

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Formation of single pinched plasma point in the cathode plasma jet of a multipicosecond laser-triggered vacuum discharge

Moorti

Naik

Gupta

et al. 2008

Review of Scientific Instruments

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Characteristics of cathode plasma jet pinching and x-ray emission from a multipicosecond laser-triggered vacuum discharge are presented. Discharge was created in between a planar Al cathode and a conical point-tip Ti anode (separation: 2-15 mm, circuit inductance of approximately 0.53 microH, peak discharge current of approximately 3 kA, and rise time of approximately 400 ns). For anode-cathode separation of approximately 13.5 mm, only a single pinched plasma point was formed in the cathode plasma jet at a distance of approximately 9.5 mm from the cathode. Quantitative analysis of the x-ray signals recorded using a pin diode with different filters and viewing different regions of the discharge, shows soft ( approximately keV photon energy) x-ray emission from the plasma point with a flux of approximately (3-5)x10(10) photons/sr, and multi-keV x-ray emission from the Ti anode with Kalpha ( approximately 4.51 keV) photon flux of approximately 10(10) photons/sr.

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Formation of single pinched plasma point in the cathode plasma jet of a multipicosecond laser-triggered vacuum discharge

Moorti

Naik

Gupta

et al. 2008

Review of Scientific Instruments

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"Point" X-ray source engendered by hot spots in a high-current discharge

Semyonov¹,

Xu²,

Philippe³

et al.

PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pu

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Applications of micropinch x-ray source

Semyonov¹,

Gurey

Kanavin

et al. 2001

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Articles you may be interested inDeveloping small vacuum spark as an x-ray source for calibration of an x-ray focusing crystal spectrometer Rev. Sci. Instrum.An experimental model of a micropinch ͑vacuum spark͒ x-ray source was tested in x-ray lithography and x-ray microscopy applications. The image resolution for the proximity lithography and microscopy methods with the micropinch source was estimated. The proximity lithography with positive and negative resists was tested in vacuum; a protection system, shielding a mask from the discharge plasma blowoff, metallic debris, and extreme ultraviolet ͑EUV͒ radiation, was installed in front of the mask. Images of the biological specimens were also obtained with x-ray resists for one-pulse exposure and a series of pulses. The effect of microrelief leveling ͑polishing͒ of the solid surfaces irradiated by the high-power pulsed soft x-ray/EUV flux was observed experimentally, and an analytical model of the effect was suggested. The effect of structural modification of the thin layers irradiated by the high power EUV flux was predicted, and the transformation of the dielectric buffer layers from the amorphous to the crystalline state was realized experimentally.

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Experimental model of industrial x-ray source MSX-1 with a vacuum spark for x-ray lithography

Abstract: Articles you may be interested inDeveloping small vacuum spark as an x-ray source for calibration of an x-ray focusing crystal spectrometer Rev.

Cited by 3 publications

References 9 publications

Formation of single pinched plasma point in the cathode plasma jet of a multipicosecond laser-triggered vacuum discharge

Formation of single pinched plasma point in the cathode plasma jet of a multipicosecond laser-triggered vacuum discharge

"Point" X-ray source engendered by hot spots in a high-current discharge

Applications of micropinch x-ray source

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