Applications of micropinch x-ray source

Abstract

Articles you may be interested inDeveloping small vacuum spark as an x-ray source for calibration of an x-ray focusing crystal spectrometer Rev. Sci. Instrum.An experimental model of a micropinch ͑vacuum spark͒ x-ray source was tested in x-ray lithography and x-ray microscopy applications. The image resolution for the proximity lithography and microscopy methods with the micropinch source was estimated. The proximity lithography with positive and negative resists was tested in vacuum; a protection system, shielding a mask from the discharge plasma blowoff, metallic debris, and extreme ultraviolet ͑EUV͒ radiation, was installed in front of the mask. Images of the biological specimens were also obtained with x-ray resists for one-pulse exposure and a series of pulses. The effect of microrelief leveling ͑polishing͒ of the solid surfaces irradiated by the high-power pulsed soft x-ray/EUV flux was observed experimentally, and an analytical model of the effect was suggested. The effect of structural modification of the thin layers irradiated by the high power EUV flux was predicted, and the transformation of the dielectric buffer layers from the amorphous to the crystalline state was realized experimentally.

Fast ion generation in the cathode plasma jet of a multipicosecond laser-triggered vacuum discharge

“…1,2 Formation of micropinches ͑plasma points or hot spots͒ of high temperature ͑T e : 1-10 keV͒ and high density ͑n e :10 22 -10 23 cm −3 ͒ in such discharges has attracted much attention as an intense x-ray source [3][4][5][6][7][8] and also as a source of multiple-charged high-energy ions. 9,10 A different mode of pinch effect, viz., cathode plasma jet pinching, has been observed in moderate-current ͑few hundreds of amperes to few kiloamperes͒ vacuum arcs and sparks.…”