Experimental demonstration of titanium nitride plasmonic interconnects

Kinsey, Nathaniel; Ferrera, Marcello; Naik, Gururaj V.; Babicheva, Viktoriia E.; Shalaev, Vladimir M.; Boltasseva, Alexandra

doi:10.1364/oe.22.012238

Cited by 83 publications

(67 citation statements)

References 45 publications

(55 reference statements)

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“…Plasmonic ceramics, such as titanium nitride and zirconium nitride, are among the best candidates that can replace conventional plasmonic metals [179,180]. Titanium nitride is CMOS-compatible and provides higher mode confinement in comparison to gold [179].…”

Section: Cmos-compatibilitymentioning

confidence: 99%

Transparent conducting oxides for electro-optical plasmonic modulators

2015

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Abstract:The ongoing quest for ultra-compact optical devices has reached a bottleneck due to the diffraction limit in conventional photonics. New approaches that provide subwavelength optical elements, and therefore lead to miniaturization of the entire photonic circuit, are urgently required. Plasmonics, which combines nanoscale light confinement and optical-speed processing of signals, has the potential to enable the next generation of hybrid information-processing devices, which are superior to the current photonic dielectric components in terms of speed and compactness. New plasmonic materials (other than metals), or optical materials with metal-like behavior, have recently attracted a lot of attention due to the promise they hold to enable low-loss, tunable, CMOScompatible devices for photonic technologies. In this review, we provide a systematic overview of various compact optical modulator designs that utilize a class of the most promising new materials as the active layer or corenamely, transparent conducting oxides. Such modulators can be made low-loss, compact, and exhibit high tunability while offering low cost and compatibility with existing semiconductor technologies. A detailed analysis of different configurations and their working characteristics, such as their extinction ratio, compactness, bandwidth, and losses, is performed identifying the most promising designs.

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Section: Cmos-compatibilitymentioning

confidence: 99%

Transparent conducting oxides for electro-optical plasmonic modulators

2015

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“…The optical characterization of TiN thin films was extensively performed later with the increasing interest in the field of plasmonics [7][8][9][10]. Improved properties with epitaxial TiN thin films have recently been demonstrated with a hyperbolic metamaterial and a plasmonic waveguide [11,12]. As a refractory plasmonic material, TiN holds the potential to solve critical issues associated with the softness and low melting points of plasmonic metals such as gold and silver [13,14].…”

Section: Introductionmentioning

confidence: 99%

Colloidal Plasmonic Titanium Nitride Nanoparticles: Properties and Applications

et al. 2015

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Optical properties of colloidal plasmonic titanium nitride nanoparticles are examined with an eye on their photothermal and photocatalytic applications via transmission electron microscopy and optical transmittance measurements. Single crystal titanium nitride cubic nanoparticles with an average size of 50 nm, which was found to be the optimum size for cellular uptake with gold nanoparticles [1], exhibit plasmon resonance in the biological transparency window and demonstrate a high absorption efficiency. A self-passivating native oxide at the surface of the nanoparticles provides an additional degree of freedom for surface functionalization. The titanium oxide shell surrounding the plasmonic core can create new opportunities for photocatalytic applications. an excitement to develop technologies for a broad range of applications. The wide range of carrier concentrations available from several material classes spans the electromagnetic spectrum from the ultra-violet through the midinfrared [2]. Additionally, the broad variety of materials studied in the field provide extra degrees of freedom to solve technological challenges thanks to the unique properties such as tunability, process compatibility, chemical stability, etc [3]. KeywordsTransition metal nitrides, especially titanium nitride (TiN), have been studied for the last three decades due to the unique combination of their material properties [4]. Metallic behavior of TiN combined with its hardness and chemical stability has attracted attention in microelectronics research [5]. Adjustable optical properties and stoichiometry of TiN thin films were examined in the 1990s [6]. The optical characterization of TiN thin films was extensively performed later with the increasing interest in the field of plasmonics [7][8][9][10]. Improved properties with epitaxial TiN thin films have recently been demonstrated with a hyperbolic metamaterial and a plasmonic waveguide [11,12]. As a refractory plasmonic material, TiN holds the potential to solve critical issues associated with the softness and low melting points of plasmonic metals such as gold and silver [13,14]. In contrast to thin films, TiN nanoparticles have not been extensively studied until recently. Localized surface plasmons (LSPs) in TiN nanoparticles were first theoretically analyzed by Quinten [15], while their first experimental demonstration was performed by Reinholdt et al. [16] In their work, cubic nanoparticles smaller than 10 nm with a broad size dispersion were fabricated through laser ablation, and plasmon resonance peaks centered around 730 nm wavelength were reported. Reinholdt et al. proposed the use of TiN nanoparticles as inorganic, stable color pigments. We have previously shown that TiN nanoparticles provide field enhancement comparable to that achievable with Au, with a broader peak spectrally positioned in the biological transparency window [17]. In a more recent study, we experimentally analyzed the absorption efficiencies of lithographically fabricated TiN and Au nanoparticles an...

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“…Based on the surface plasmon resonances that develop in noble metal nanostructures (Ag and Au) [1,2], in the visible and nearinfrared, amounts of applications, including surface-enhanced Raman scattering (SERS), photothermal therapy, biosensing, hot carrier generation for photovoltaic conversion, and quantum information processing [8][9][10][11][12][13], have been demonstrated over the last decades. Since then, surface plasmon resonances have been achieved with "alternative" plasmonic materials, for example, other metals (Al, Pt, and Pd) [14,15], transparent conductive oxides [16], metal nitrides [17], doped semiconductors [16], and graphene [18]. Such materials display a plasmonic response in different spectral regions, as dictated by their free charge carrier density N. Note that plasmonic resonances can be excited when the complex dielectric function of the material (ε � ε 1 + iε 2 ) shows suitable values, especially having a negative real part (ε 1 < 0) is required.…”

Section: Introductionmentioning

confidence: 99%

Nanobismuth: Fabrication, Optical, and Plasmonic Properties—Emerging Applications

Tian

Toudert

2018

Journal of Nanotechnology

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Along the twentieth century, the electronic properties of bismuth have been widely studied, especially in relation with its magnetoresistive and thermoelectric responses. In this context, a particular emphasis has been made on electronic confinement effects in bismuth nanostructures (or nanobismuth). In the recent years, the optical properties of bismuth nanostructures are focusing a growing interest. An increasing number of reports point at the potential of such nanostructures to support plentiful optical resonances over an ultrabroad spectral range: "interband plasmonic" resonances in the ultraviolet, visible, and nearinfrared; dielectric Mie resonances in mid-and far-infrared; and conventional free-carrier plasmonic resonances in the farinfrared and terahertz. With the aim to provide a comprehensive basis for exploiting the full optical potential of bismuth nanostructures, we review the current progress in their controlled fabrication, the trends reported (from theoretical calculations and experimental observations) for their optical and plasmonic response, and their emerging applications, including photocatalysis and switchable metamaterials.

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Experimental demonstration of titanium nitride plasmonic interconnects

Cited by 83 publications

References 45 publications

Transparent conducting oxides for electro-optical plasmonic modulators

Transparent conducting oxides for electro-optical plasmonic modulators

Colloidal Plasmonic Titanium Nitride Nanoparticles: Properties and Applications

Nanobismuth: Fabrication, Optical, and Plasmonic Properties—Emerging Applications

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