Experimental and simulation investigations of acoustic cavitation in megasonic cleaning

Characterization of transient cavitation in gas sparged solutions exposed to megasonic field using cyclic voltammetry

“…Cyclic voltammetry experiments (scan rate of 0.05 V/s) were first conducted in a solution of 50 mM of K 3 Fe(CN) 6 and 0.1 M KCl saturated with argon gas in the absence and presence of megasonic energy. The results for these measurements at data acquisition rate of 20 Hz are shown in Fig.…”

“…Chemical reagents, potassium ferric cyanide (99.9% K 3 Fe(CN) 6 ) and potassium chloride (99.9% KCl) were purchased from Alfa Aesar and were used as received. Platinum wires were of 99.99% purity and purchased from Goodfellow.…”

“…Platinum wires were of 99.99% purity and purchased from Goodfellow. Aqueous solutions containing 50 mM of K 3 Fe(CN) 6 and 0.1 M KCl (as supporting electrolyte) were prepared using ultra pure water of resistivity 18 MO cm. The solution at 22 ± 2°C was saturated with a gas (>99% purity) of interest (argon, nitrogen or carbon dioxide) by bubbling the gas in the solution for 30 min.…”

“…Several studies have been conducted to identify the role of dissolved gases on particle removal and damage to structures under megasonic conditions [2][3][4][5][6][7]. These studies have been aimed at investigating the removal of silicon dioxide and silicon nitride particles of different sizes from silicon wafers in chemical solutions irradiated with megasonic energy and containing dissolved gases such as N 2 , O 2 , He and CO 2 .…”

“…Cyclic voltammetry results obtained in argon saturated DI water containing 50 mM K 3 Fe(CN)6 and 0.1 M KCl solution irradiated with sound of $1 MHz frequency at different power densities (25 lm WE, scan rate = 0.05 V/s, data acquisition rate = 20 Hz). (Note: 7 point moving average was taken for Ar_No megasonic to eliminate the background noise.)…”