Use of Surfactants in Acoustic Cleaning

Thanu, Dinesh P.R.; Antoniswamy, Aravindha R.; Swaminathan, Vikhram V.; Srinadhu, Endu Sekhar; Dole, Nikhil V.; Zhao, Mingrui; Balachandran, Rajesh; Agrawal, Daksh; Kumar, Jatinder; Keswani, Manish

doi:10.1016/b978-0-12-822216-4.00002-1

Cited by 2 publications

(1 citation statement)

References 59 publications

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“…We show that increasing the temperature in the water impacts the threshold of transient cavitation and the particle-removing performance. We can help build up a set up to optimize the power transferred from the piezoelectric transducer to the liquids to control megasonic agitation on Nano-structures [47].…”

Section: F Temperature Effectmentioning

confidence: 99%

Experimental Analysis of Water-1MHz-gasified with O2, and Simulation Analysis of Physicals Parameters Effect of Solvents in Megasonic Cleaning

Rhabi,

Taha,

Hmamou

et al. 2023

Int. J. Adv. Sci. Eng. Inf. Technol.

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Aqueous chemicals and solvents are used heavily in semiconductor manufacturing, and device manufacturers are focused on advancing these cleaning liquids to the next technology node. The scientific results confirm that ultrasonic agitation can improve the removal of particles. Megasonic energy has been proven to improve particle elimination in semiconductor devices in cleaning procedures. On the other hand, applied ultrasonic energy may damage the sensible devices in the cleaning process. In order to better comprehend, we explore in this paper the impact of different liquid properties by showing the transient cavitation threshold by performing some simulations with the analytical Blake model and the numerical Gilmore model. The experimental setup firstly to understand the temporal and spectral response of the increasing of the electrical power, and secondly to investigate that increasing the gas level in the cleaning bath in Water-1MHz-gasified with O_2 modifies the acoustical pressure in the medium. We can conclude that the experimental measurements and simulation studies of the applicable sound wave field and cavitation level provide an important indication of the medium's properties. By proceeding in this manner, we can find the impact parameters on the onset of transient cavitation and the safe area to treat client wafers. At this point, we can figure out the cavitation threshold that works for us and safely translate it from one chemical process to another.

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Section: F Temperature Effectmentioning

confidence: 99%

Experimental Analysis of Water-1MHz-gasified with O2, and Simulation Analysis of Physicals Parameters Effect of Solvents in Megasonic Cleaning

Rhabi,

Taha,

Hmamou

et al. 2023

Int. J. Adv. Sci. Eng. Inf. Technol.

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An Experimental Study of Cavitation Bubble Dynamics near a Complex Wall with a Continuous Triangular Arrangement

Zheng

Wang

et al. 2023

Symmetry

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The mechanism of cavitation cleaning of complex surfaces has received more and more attention. In the present paper, with the help of a high-speed photography experimental system, the dynamic behavior of a cavitation bubble in symmetrical positions near a complex wall with a continuous triangular arrangement is investigated. In terms of the bubble size and the initial wall–bubble distance, the non-uniform shrinkage of the bubble collapse and the movement characteristics of the bubble centroid are revealed. The main conclusions are as follows: (1) The collapse dynamic behavior of the bubble near a complex wall with a continuous triangular arrangement can be divided into three typical cases. (2) According to a large number of experimental results under different parameters, the parameter ranges corresponding to the three cases and the critical values between different cases are given. (3) The larger the bubble size is, or the smaller the initial wall–bubble distance is, the more significant the effect of the complex wall is, and the greater the movement distance towards the complex wall during the collapse stage.

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Use of Surfactants in Acoustic Cleaning

Cited by 2 publications

References 59 publications

Experimental Analysis of Water-1MHz-gasified with O2, and Simulation Analysis of Physicals Parameters Effect of Solvents in Megasonic Cleaning

Experimental Analysis of Water-1MHz-gasified with O2, and Simulation Analysis of Physicals Parameters Effect of Solvents in Megasonic Cleaning

An Experimental Study of Cavitation Bubble Dynamics near a Complex Wall with a Continuous Triangular Arrangement

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