2008
DOI: 10.1116/1.2976572
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Evaluation of electron energy spread in CsBr based photocathodes

Abstract: Photocathodes with relatively low energy spread ͑Ͻ0.5 eV͒ are required for electron sources in several applications including single and multiple electron beam inspection and lithography tools and free electron lasers. CsBr based photocathodes have been shown to be very robust and capable of operation at high current density ͑Ͼ150 A / cm 2 ͒ with very long lifetime ͑approximately hundreds of hours/spot͒. Experimental results of the photoelectron energy spread obtained in CsBr films deposited on both metal and … Show more

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Cited by 9 publications
(10 citation statements)
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“…For a good material in the lithography application, the number of secondary electrons should be low to maximize the contrast between reflective electrodes at low voltages. 4 The size of the beam on the sample measured along two perpendicular directions with a pinhole and a Faraday cup is shown in Fig. Figure 2 shows the behavior of a machined and unpolished flat surface of a Cu rod with about 1 in.…”
Section: Descriptionmentioning
confidence: 99%
“…For a good material in the lithography application, the number of secondary electrons should be low to maximize the contrast between reflective electrodes at low voltages. 4 The size of the beam on the sample measured along two perpendicular directions with a pinhole and a Faraday cup is shown in Fig. Figure 2 shows the behavior of a machined and unpolished flat surface of a Cu rod with about 1 in.…”
Section: Descriptionmentioning
confidence: 99%
“…Robust CsBr photoemitters have been demonstrated and characterized, and they show significant promise for multiple electron-beam systems. [2][3][4][5] The virtual source size of an electron source is determined by the size of the emission area. Therefore, the laser spot, which controls the size of the photoemission area, determines the virtual source size.…”
Section: Introductionmentioning
confidence: 99%
“…CsBr on InGaN, for example, produces an energy spread less than 0.5 eV FWHM with CsBr thicknesses well above 100Å (Ref. 17) in measurements with the sample illuminated from the rear, and CsBr on copper substrates produce a FWHM of 0.77 eV in measurements performed using the same equipment and technique as this work. 18 Therefore, it seems unlikely that CsBr directly increases the energy spread.…”
mentioning
confidence: 99%
“…17,18 However, we have demonstrated the ability of diamondoids to reduce the energy spread of these types of devices, and it should be possible to add the diamondoid monolayers onto the other, more desirable substrates if a suitable monolayer attachment method can be found.…”
mentioning
confidence: 99%
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