The adhesion or sticking of glass on the mold is a major obstacle in multiple glass hot forming techniques, including glass hot embossing, 1 glassware production, 2 as well as precision glass molding (PGM). 3 The chemical reaction and diffusion on the interface 4,5 take much responsibility for the glass-tomold adhesion, due to long-duration contact under high temperature or/and high pressure. In order to reduce the adhesion in PGM, much attention has been paid to mitigate the chemical interactions between glass and molds, which is realized by deposition of high quality anti-sticking coatings 6-8 onto