“…In addition to the parameters used in Lau and Yue, [9] Table 1 has also included the parameter of SiO2 thickness, which results in a smaller planar equivalent thermal conductivity and a larger vertical equivalent thermal conductivity of TSV cell than the isotropic thermal conductivity of silicon. The studies of Chien et al [1,2] derived the empirical correlations of equivalent TSV thermal conductivities in planar and vertical directions. 10, 20, 30, 50, 100, 150 10, 20, 50, 100, 150, 200 10, 20, 50, 100, 150, 250 10, 20, 50, 100, 150, 250 10, 20, 50, 100, 150, 250 P(μm) 25, 35, 40, 50, 70, 100, 130 35, 45, 55, 65, 80, 120, 150 45, 55, 65, 75, 100, 150, 200 55, 65, 75, 85, 100, 150, 200 65, 75, 85, 100, 150, 200 TSVs.…”