Electrostatic discharge (ESD) and Electrical Overstress (EOS) are well-known problems in integrated circuits that affect the reliability, yield and cost. In addition, it has been reported that ESD/EOS contributes to significantly large fraction of failures [1]. It is important to design ESD protection circuits that are able to prevent these failures. In this work, a 65 nm hybrid ESD power supply clamp, which consists of static and transient clamps, for low leakage applications is presented. A diode configuration is used as a static clamp, while the transient clamp consists of a PMOS as the main transistor with body bias and thyristor as a delay element. Simulation and measurement results show that the clamp has fast response for ESD-like event.Extensive stability analysis demonstrates that the clamp is stable against false triggering, oscillation, power supply noise and latchup. Carried out measurement results also show that the clamp is capable of handling 1.55A of current while its leakage is only 32.9nA, whereas the traditional clamp has a leakage of 1.47µA.