The authors report the buildup fabrication and magnetic domain characterizations of anisotropic-shaped MnAs nanoclusters position-controlled on partially SiO 2 -masked GaAs ͑111͒B substrates by selective-area metal-organic vapor phase epitaxy. Magnetic force microscopy reveals that both the symmetric-and anisotropic-shaped nanoclusters show spontaneous magnetization at room temperature. Some of the nanoclusters show a single magnetic domain, in which magnetized directions are along one of the a-axes of NiAs-type MnAs, after the external magnetic fields up to 3500 Gauss are applied in-plane. The magnetic domains are well controlled by introducing both magnetocrystalline and shape magnetic anisotropies in the anisotropic-shaped nanoclusters. © 2009 American Institute of Physics. ͓DOI: 10.1063/1.3157275͔ Recent research activities for heteroepitaxial nanostructures of ferromagnet and III-V compound semiconductor ͑FM III-V hybrids͒ have gained much attention in the future nanospintronic device applications.1 It was reported that large tunneling magnetoresistance effect was shown in the MnAs/AlAs/MnAs heterostructures 2 and the GaAs:MnAs granular layers 3,4 above room temperature ͑RT͒, and that ferromagnetic NiAs-type MnAs layers served as an electrical spin injection source for semiconductors. 5 In recent theoretical calculations, in addition, it has been predicted that the electronic band-structure of hypothetical zinc-blende ͑ZB͒-type MnAs layers is half-metallic, which is promising nature for device applications.6-8 Thus far, conventional approaches to realizing nanospintronic devices using FM III-V hybrids have been mostly "top-down" fabrication techniques after the epitaxy because it has been necessary to grow the epitaxial ferromagnetic and semiconducting layers by molecular beam epitaxy at an extremely low growth temperature. [2][3][4][5]9