2017
DOI: 10.1109/lpt.2017.2703599
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Enhancement of VCSEL Performances Using Localized Copper Bonding Through Silicon Vias

Abstract: International audienceWe report on a new cost effective, with a low temperature budget and simple bonding process on silicon, presenting efficient heat spreading and great potentialities in integration. This process is based on a thick electro-plated copper bonding layer through silicon vias and is expected to reduce significantly the bonded device internal temperature. We apply this process to realize 1.55-μm emitting vertical-cavity surface-emitting lasers. We demonstrate continuous wave operation from room … Show more

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Cited by 3 publications
(2 citation statements)
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“…These layers are added to the quarter-wave SiN x layer already deposited by PECVD to form a DBR of 3 periods with a theoretical reflectivity of 97%. Such a DBR has been chosen as bottom mirror since its deposition and etching are well controlled and have already been used within other types of III-V devices [21]. This DBR is then etched on the edges of the sample to keep an electrical access to the different PDs (see Fig.…”
Section: Tunable Filter Fabricationmentioning
confidence: 99%
“…These layers are added to the quarter-wave SiN x layer already deposited by PECVD to form a DBR of 3 periods with a theoretical reflectivity of 97%. Such a DBR has been chosen as bottom mirror since its deposition and etching are well controlled and have already been used within other types of III-V devices [21]. This DBR is then etched on the edges of the sample to keep an electrical access to the different PDs (see Fig.…”
Section: Tunable Filter Fabricationmentioning
confidence: 99%
“…Short-reach optical communications increasingly demand light sources with sufficient output power, small size, low cost, high efficiency, stable single-mode operation, and the capability to be directly modulated at high-speeds [4]. In the past few decades, vertical-cavity surface emitting lasers (VCSELs) have been widely developed and used in 1-100Gb/s communication systems due to their low cost, robust operation, and high performance [5,6].…”
Section: Introductionmentioning
confidence: 99%