Enhancement of Plasma-Driven System With Piezoelectric Transformer-Based Feedback Control Approaches and a Contactless Power Source

Abstract

This paper proposes a plasma-driven system with piezoelectric transformer-based feedback control approaches along with a contactless power source. The research is motivated because many plasma-driven circuits employed the bulky components as resonant circuit and current feedback sensors. Hence, this study proposes to utilize one piezoelectric ceramic transformer to serve for both resonance tank and feedback devices in order to achieve the low cost and design simplification. Moreover, since the plasma discharge often suffers the problem of high humidity and particle-polluted environment, a contactless power transfer circuit integrated with a high-frequency coil is developed as the power source, by which the electrode damage can be better prevented. To reach a better discharge quality and own a higher flexibility of regulating power, the study also completes a constant-power control mechanism and a phase-locked loop control. Both software simulations and hardware realization have been accomplished. Analysis results and experimental outcome help validate the practicality of the proposed approach.Index Terms-Plasma discharge, piezoelectric transformer, contactless power transfer, phase-locked loop control.