Enhanced sensitivity volatile detection with low power integrated micromechanical resonators

Karabacak, Devrez M.; Brongersma, Sywert; Crego‐Calama, Mercedes

doi:10.1039/b926170b

Cited by 38 publications

(32 citation statements)

References 39 publications

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“…This frequency shift is due to a stress formation within the length restricted beam. 2 The bias dependency of 0.035%/V found using the ring-down circuit agrees well with the results obtained using an impedance analysis (0.03%/V). Figure 11 shows the transient response of the resonator in a dry nitrogen flow during exposure to ethanol at 1000 ppm concentration.…”

Section: Resultssupporting

confidence: 79%

“…When the resonator is exposed to the ethanol vapor, the modal frequency is decreasing due to the absorption of the volatile compound in the polymer coating, as previously described in detail. 2 The ethanol flow was applied twice, and the resonator was exposed to dry air after each exposure to demonstrate the recovery. The circuit implemented on chip consumes 36 μA from a 3.3 V supply.…”

Section: Resultsmentioning

confidence: 99%

“…1(a). The devices, fabricated using standard microfabrication techniques, 2 have typical dimensions of 100 μm to 1000 μm in length, 20 μm to 100 μm in width, and 500 nm SiN thickness. The transducer layer is formed by aluminum nitride (AlN) sandwiched between two metal electrodes, covering a quarter of the suspended region.…”

Section: Device Characteristicsmentioning

confidence: 99%

“…1 For instance, polymer-coated high-aspect (length to thickness) ratio clamped-clamped beam resonators with integrated piezoelectric transducers have been demonstrated to be highly responsive to low concentrations of volatile organic compounds. 2 Clearly, there exists a need to develop an energy-efficient approach to readout micro/nano-mechanical resonators to fulfill their promise as integrated sensing elements. Ideally, the readout circuit needs to be capable of tracking miniscule changes in modal properties of the resonator while consuming minimum energy per measurement.…”

Section: Introductionmentioning

confidence: 99%

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An energy-efficient readout circuit for resonant sensors based on ring-down measurement

Zhou

Pertijs

Karabacak

2013

Review of Scientific Instruments

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This paper presents an energy-efficient readout circuit for resonant sensors that operates based on a transient measurement method. The resonant sensor is driven at a frequency close to its resonance frequency by an excitation source that can be intermittently disconnected, causing the sensor to oscillate at its resonance frequency with exponentially decaying amplitude. By counting the zero crossings of this ring-down response, the interface circuit can detect the resonance frequency. In contrast with oscillator-based readout, the presented readout circuit is readily able to detect quality factor (Q) of the resonator from the envelope of the ring-down response, and can be used even in the presence of large parasitic capacitors. A prototype of the readout circuit has been integrated in 0.35 μm CMOS technology, and consumes only 36 μA from a 3.3 V supply during a measurement time of 2 ms. The resonance frequency and quality factor of a micro-machined SiN resonator obtained using this prototype are in good agreement with results obtained using impedance analysis. Furthermore, a clear transient response is observed to ethanol flow using the presented readout, demonstrating the use of this technique in sensing applications.

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Section: Resultssupporting

confidence: 79%

Section: Resultsmentioning

confidence: 99%

Section: Device Characteristicsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

An energy-efficient readout circuit for resonant sensors based on ring-down measurement

Zhou

Pertijs

Karabacak

2013

Review of Scientific Instruments

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“…Details of the fabrication procedure are described in Ref. 22. An ac voltage on the piezo produces a force on the resonator and at the same time modulates its spring constant.…”

Section: Device Detailsmentioning

confidence: 99%

Interactions between directly- and parametrically-driven vibration modes in a micromechanical resonator

et al. 2011

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The interactions between parametrically-and directly-driven vibration modes of a clamped-clamped beam resonator are studied. An integrated piezoelectric transducer is used for direct and parametric excitation. First, the parametric amplification and oscillation of a single mode are analyzed by the power and phase dependence below and above the threshold for parametric oscillation. Then, the motion of a parametrically-driven mode is detected by the induced change in resonance frequency in another mode of the same resonator. The resonance frequency shift is the result of the nonlinear coupling between the modes by the displacement-induced tension in the beam. These nonlinear modal interactions result in the quadratic relation between the resonance frequency of one mode and the amplitude of another mode. The amplitude of a parametrically-oscillating mode depends on the square root of the pump frequency. Combining these dependencies yields a linear relation between the resonance frequency of the directly-driven mode and the frequency of the parametrically-oscillating mode.

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Macroporous Polymer Cantilever Resonators for Chemical Sensing Applications

Dąbrowski,

Reculusa,

Thuau

et al. 2023

Adv Materials Technologies

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A novel, cost‐effective strategy for sensing performance enhancement of cantilever‐shaped, mass‐sensitive sensors is presented. The developed strategy relies on the introduction of macroporosity in the recognition unit. The developed sensors are successfully applied in air humidity monitoring as well as in chemical sensing. As mass‐sensitive transducers, polymer microelectromechanical systems (MEMS) in the form of poly(vinylidene fluoride‐trifluoroethylene) [P(VDF‐TrFE)] cantilever resonators are specifically developed. These resonators are modified with a hierarchically structured macroporous poly(2,3′‐bithiophene) film, acting as a sensing layer. The design of the recognition layer takes advantage of the synergistic combination of inverse opal structuring, surface imprinting, and semi‐covalent imprinting of proteins. The resulting cantilever resonators are first successfully tested for air humidity monitoring in the whole relative humidity range (ca.10 – 90%). When the recognition layer is composed of human serum albumin‐imprinted polymer (HSA‐MIP) with a hierarchical structure, it can also be used as a selective chemosensor in a concentration range from 10 pM to 20 µM. The obtained results demonstrate that the macroporosity of the receptor film significantly enhances the sensor performance.

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Enhanced sensitivity volatile detection with low power integrated micromechanical resonators

Cited by 38 publications

References 39 publications

An energy-efficient readout circuit for resonant sensors based on ring-down measurement

An energy-efficient readout circuit for resonant sensors based on ring-down measurement

Interactions between directly- and parametrically-driven vibration modes in a micromechanical resonator

Macroporous Polymer Cantilever Resonators for Chemical Sensing Applications

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