2011
DOI: 10.1103/physrevb.84.134305
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Interactions between directly- and parametrically-driven vibration modes in a micromechanical resonator

Abstract: The interactions between parametrically-and directly-driven vibration modes of a clamped-clamped beam resonator are studied. An integrated piezoelectric transducer is used for direct and parametric excitation. First, the parametric amplification and oscillation of a single mode are analyzed by the power and phase dependence below and above the threshold for parametric oscillation. Then, the motion of a parametrically-driven mode is detected by the induced change in resonance frequency in another mode of the sa… Show more

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Cited by 32 publications
(28 citation statements)
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“…In particular, nanoscale mechanics exhibits enhanced nonlinearity [14,15] and tunability [16,17], which has been used to suppress feedback noise [18,19] and create new types of electromechanical oscillators [20][21][22]. These oscillators may find application as mass [23], gas [24,25], or force sensors [26], without the need of an external frequency source.…”
mentioning
confidence: 99%
“…In particular, nanoscale mechanics exhibits enhanced nonlinearity [14,15] and tunability [16,17], which has been used to suppress feedback noise [18,19] and create new types of electromechanical oscillators [20][21][22]. These oscillators may find application as mass [23], gas [24,25], or force sensors [26], without the need of an external frequency source.…”
mentioning
confidence: 99%
“…Nonlinear modal interactions have been studied recently in micro-and nanoresonators. [13][14][15][16][17][18] These studies concentrated on mechanical coupling between the modes via the geometric nonlinearity or via the displacement-induced tension, the same mechanism responsible for the Duffing nonlinearity in doubly clamped resonators. By employing a different mode of the same resonator as a phonon cavity, the mechanical mode can be controlled in situ, and its damping characteristics can be modified to a great extent, leading to cooling of the mode and parametric mode splitting.…”
mentioning
confidence: 99%
“…13,16 The nonlinear coupling can also be used to detect resonance modes that would otherwise be inaccessible by the experiment 18 to increase the dynamic range of resonators by tuning the nonlinearity constant 18 and for mechanical frequency conversion. 17 Additionally, nonlinear coupling has been proposed as a quantum nondemolition scheme to probe mechanical resonators in their quantum ground state 19 and as a way of generating entanglement between different mechanical modes. 20 Furthermore, a recent theoretical paper suggests that the interaction between mechanical resonances could be responsible for the spectral broadening in carbon nanotubes, thus, limiting their Q factor at room temperature.…”
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confidence: 99%
“…Fortunately, these microstructural components' behavior can be formulated based on the Euler-Bernoulli beam or Timoshenko beam theory [81][82][83][84][85]. Researchers have investigated both linear and nonlinear vibration based energy harvesting devices, in which these devices were modeled using beam theory [84,[86][87][88][89][90]. Beam theory was also extended to nanomechanical cantilevers, such as the efforts performed by Villanueva et al [91].…”
Section: Microsystems Vibrationsmentioning
confidence: 99%