2013
DOI: 10.1063/1.4832068
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Enhanced production of electron cyclotron resonance plasma by exciting selective microwave mode on a large-bore electron cyclotron resonance ion source with permanent magnet

Abstract: We are constructing a tandem type ECRIS. The first stage is large-bore with cylindrically comb-shaped magnet. We optimize the ion beam current and ion saturation current by a mobile plate tuner. They change by the position of the plate tuner for 2.45 GHz, 11-13 GHz, and multi-frequencies. The peak positions of them are close to the position where the microwave mode forms standing wave between the plate tuner and the extractor. The absorbed powers are estimated for each mode. We show a new guiding principle, wh… Show more

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Cited by 7 publications
(2 citation statements)
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“…The structure of ECR plasma source. A typical example of ECR plasma sources [4][5][6], including a discharge chamber, an ECR magnetic system, a vacuum system and a gas circuit, is presented in Fig. 1.…”
Section: Electron Cyclotron Resonance Plasma Sourcementioning
confidence: 99%
“…The structure of ECR plasma source. A typical example of ECR plasma sources [4][5][6], including a discharge chamber, an ECR magnetic system, a vacuum system and a gas circuit, is presented in Fig. 1.…”
Section: Electron Cyclotron Resonance Plasma Sourcementioning
confidence: 99%
“…On the other hand, our device makes it possible to understand phenomena in existing plasma parameters by taking advantage of the ability to measure their distributions in the ECR plasma. As a result of experimental verification of the efficiency of ECR [6][7][8] and consideration of the accessibility condition of electromagnetic wave propagation in the magnetized plasma in ECRIS, the possibility of highfrequency upper hybrid resonance (UHR) heating was shown [9]. By the way, the UHR is the lowestorder mode resonance of the electron Bernstein wave (Bn wave) that converts the mode from electromagnetic waves to electrostatic waves [1].…”
Section: Introductionmentioning
confidence: 99%