According to the accessibility conditions of wave propagation in the magnetized plasma of an electron cyclotron resonance (ECR) ion source (ECRIS), it is speculated that the essential factor that determines the limitations in the multiply charged ion currents is the left-hand polarization wave cutoff (L-cutoff). It is necessary to overcome this limitation, we proposed the introduction of ion cyclotron resonance (ICR) or lower hybrid resonance (LHR) by lower frequency waves. We conduct heating low-mass ions selectively in enhanced producing multiply charged ion by mixing low-mass element gas, which has been conventionally performed in ECRIS, or relaxation of the potential well based on the existence of resonant electron particles by ECR. This paper will describe the initial experimental results of ICR application by introducing low-frequency RF electromagnetic waves in the ECRIS.