Enhanced Production of Multicharged Ions by Mixing Low Z Gas and Emittance Measurement on Electron Cyclotron Resonance Ion Source

Abstract

We have studied to enhance efficiency of producing multicharged ions in an electron cyclotron resonance ion source (ECRIS). The gas mixing method is known as an empirical method for highly efficient production of multicharged ions. This method is to mix low Z gas into the multicharged ions plasma. There are various explanations for the gas mixing effect. One of them is the ion cooling effect. It is necessary to obtain parameters related to the ion temperature in order to experimentally confirm the effect. We measured emittances for ion beams by using a wire probe and a multi-slit. He was mixed as a low Z gas into the operating Ar gas. Charged state distributions of ion beams was measured to confirm the gas mixing effect. We have also measured emittances for the multicharged Ar ion beams and compared root mean square emittances (ε rms) of those for pure Ar and Ar mixed by He. We confirmed that ε rms for Ar mixed by He was lower than that for pure Ar.