The Current Status of Development and Applications of Wave-Heated Discharge Plasma Sources

Abstract

Wave-heated discharges are well known as high-efficiency methods to generate high-density plasma at low pressures. In this paper, three types of plasma sources based on different wave-heated discharge principles are introduced systematically. Electron cyclotron resonance plasma, helicon wave plasma, and surface wave plasma systems are promising to be the next generation of plasma sources to meet increasingly strict requirements in microelectronics industry due to their remarkable advantages over conventional plasma sources.

Correlations between density distributions, optical spectra, and ion species in a hydrogen plasma (invited)

“…[1][2][3] Recent results demonstrate the capabilities of 2.45 GHz plasma sources for producing intense beams of molecular hydrogen ions 4,5 attracting the interest on these devices for manifold applications. 6,7 Several plasma distributions where visible light emission suggests different dynamics of the H + , H + 2 , and H + 3 populations have been reported.…”

The relationship between visible light emission and species fraction of the hydrogen ion beams extracted from 2.45 GHz microwave discharge

“…[1][2][3] For the hydrogen specific case, a profound interest on plasma processes determining the ion species fraction dynamics is emerging due to the necessity of H + 2 and H + 3 molecular ion beams for different applications from hadron therapy to neutrino experiments. [4][5][6] Recent results demonstrate the capabilities of the 2.45 GHz plasma sources for producing intense beams of molecular hydrogen ions.…”