Encapsulated disk resonator gyroscope with differential internal electrodes

HyuckAhn, Chae; Shin, Dongsuk D.; Hong, Vu A.; Yang, Yushi; Ng, Eldwin J.; Chen, Yunhan; Flader, Ian B.; Kenny, Thomas W.

doi:10.1109/memsys.2016.7421792

Cited by 10 publications

(3 citation statements)

References 14 publications

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“…A number of developments of micromechanical gyroscopes with a flat axisymmetric resonator, structurally consisting of a series of concentric rings connected by radial bonds [9][10][11][12][13][14][15][16][17][18][19], are closely adjacent to the class of MEMS gyroscopes at BAW. This direction can be considered as a development of the concept of gyroscopes with ring resonators, caused by the desire to increase the effective mass of the working forms of vibrations.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear Dynamics of a Microscale Rate Integrating Gyroscope with a Disk Resonator under Parametric Excitation

Indeitsev¹,

Zavorotneva²,

Lukin³

et al. 2023

Nelin. Dinam.

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This article presents an analytical study of the dynamics of a micromechanical integrating gyroscope with a disk resonator. A discrete dynamic model of the resonator is obtained, taking into account the axial anisotropy of its mass and stiffness properties, as well as the action of the electrical control system of oscillations. An analysis of the spectral problem of disk vibrations in the plane is carried out. The nonlinear dynamics of the resonator in the regimes of free and parametrically excited vibrations are investigated. In the mode of parametric oscillations, qualitative dependencies of the gyroscopic drift on the operating voltage, angular velocity and parameters of defects are obtained.

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Section: Introductionmentioning

confidence: 99%

Nonlinear Dynamics of a Microscale Rate Integrating Gyroscope with a Disk Resonator under Parametric Excitation

Indeitsev¹,

Zavorotneva²,

Lukin³

et al. 2023

Nelin. Dinam.

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“…Compared with the hemispheric gyroscope proposed in recent years, which has the best performance among vibratory gyroscopes, ring or disk resonators have unique advantages in terms of the fabrication difficulty for their two-dimensional structures [ 29 , 30 ]. Between ring and disk types, the disk resonator has a better performance than the ring resonator because the disk structure characteristics possess higher detection sensitivity, Q-factor, and better electrostatic tuning ability [ 31 , 32 ].…”

Section: Introductionmentioning

confidence: 99%

Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope

Wang

Chen

Tsukamoto

et al. 2023

Sensors

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In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring segments can be controlled by replacing the straight beam spokes with the elliptic spokes. The degeneration of two n = 2 wineglass modes could be realized by optimizing the design parameters of the elliptic spokes. The mode-matched resonator could be obtained when the design parameter, aspect ratio of the elliptic spokes was 25/27. The proposed principle was demonstrated by both numerical simulation and experiment. A frequency mismatch as small as 1330 ± 900 ppm could be experimentally demonstrated, which was much smaller than that of the conventional disk resonator, which achieved as high as 30,000 ppm.

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“…The micro-electromechanical system (MEMS) disk resonator gyroscope (DRG) is a typical wine-glass mode gyroscope and it has become more favorable for high performance MEMS gyroscopes [ 1 , 2 , 3 , 4 ]. A lot of progress has been made on the disk resonator and DRG, including Q factor optimization [ 5 , 6 , 7 , 8 ], frequency tuning [ 9 , 10 , 11 ], resonator noise analysis and structure optimization [ 12 , 13 , 14 , 15 ], microcosmic dynamics analysis [ 16 , 17 ], nonlinear models of disk resonators [ 18 , 19 ], and fabrication processes [ 20 , 21 ].…”

Section: Introductionmentioning

confidence: 99%

First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope

Wang

Xie

2020

Sensors

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In this paper, a first-order closed-loop mechatronics model of a micro-electromechanical system (MEMS) disk resonator gyroscope (DRG) with a configurable ASIC is established for closed-loop design and performance analysis. There are usually some nonlinear modules in the gyroscope mechatronics model, and it is difficult to design the closed-loop controllers using classical automatic control theory. An order-reduction method (ORM) based on the Laplace transform and inverse Laplace transform is proposed to linearize the nonlinear modules. The linearized model is proved to show good agreement with the original mechatronics model in terms of system response. The experimental verification was conducted to demonstrate the validation of this method.

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Encapsulated disk resonator gyroscope with differential internal electrodes

Cited by 10 publications

References 14 publications

Nonlinear Dynamics of a Microscale Rate Integrating Gyroscope with a Disk Resonator under Parametric Excitation

Nonlinear Dynamics of a Microscale Rate Integrating Gyroscope with a Disk Resonator under Parametric Excitation

Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope

First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope

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